AlGaN/GaN-based high electron mobility transistors (HEMTs), Schottky diodes and/or resistors have been presented as sensing devices for mechanical or chemical sensors operating in extreme conditions. Creation of appropriate diaphragms and/or cantilevers out of substrate materials is necessary for further improvement of sensing properties of such MEMS sensors. The sensitivity of the AlGaN/GaN based MEMS pressure sensor can be modified by membrane thickness. In case of SiC as substrate material of the epitaxial AlGaN/GaN heterostructure layers, we applied laser ablation technique for micromachining of the membranes. We were able to verify the feasibility of this process by fabrication of micromechanical membrane structures also in bulk 3C-SiC, borosilicate glass, sapphire and Al₂O₃ ceramic substrates by femtosecond laser (520 nm) ablation. On a 350 µm-thick 4H-SiC substrate we produced an array of 275 µm deep and 1000–3000 µm in diameter blind holes without damaging the 2 µm GaN layer at the back side. Our experiments indicate that pinhole defects in the ablated membranes are affected by ripple structures related to the polarization of the laser. We developed an ablation technique inhibiting the formation of pin holes caused by laser induced periodic surface structures (LIPSS).

Semiconducting metal oxides are widely used for solar cells, photo-catalysis, bio-active materials and gas sensors. Besides the material properties of the semiconductor being used, the specific surface topology of the sensors determines device performance. This study presents different approaches for increasing the sensing area of semiconducting metal oxide gas sensors. Micro- and nanopatterned laser-induced periodic surface structures (LIPSSs) are generated on silicon, Si/SiO₂ and glass substrates. The surface morphologies of the fabricated samples are examined by FE SEM. We selected the nanostructuring and characterization of nanostructured source Ni/Au and Ti/Au films prepared on glass using laser ablation as the most suitable of the investigated approaches. Surface structures produced on glass by backside ablation provide 100 nm features with a high surface area; they are also transparent and have high resistivity. The value of the hydrogen sensitivity in the range concentrations from 100 to 500 ppm was recorded using transmittance measurements to be twice as great for the nanostructured target TiO₂/Au as compared to the NiO/Au. It was found that such transparent materials present additional possibilities for producing optical gas sensors.

By a simple femtosecond laser process, we fabricate metal-oxide/gold composite films for electrical and optical gas sensors. We designed a dripple wavelength AWG-spectrometer, matched to the plasma absorption wavelength region of the composite films. H2/CO absorptions fit well with the AWG design for multi gas detection sensor arrays.

The aim of the present study was firstly to determine the manufacturing feasibility of a specific surface 3D-microtexturing on steel through an ultra-short pulsed laser, and secondly to investigate the tribological properties under 2 different lubrication conditions: oil-lubricated and antifriction coated. The selected 3D-microtexture consisted of 2 different levels of quadratic micropillars having side dimensions of approximately 45 µm, heights of about 35 µm and periods of 80 µm. It was shown that the production of specific 3D-microtextures on steel substrates using an ultra-short pulsed laser was feasible, and that the reproducibility of the texture dimensions over the entire textured region was extremely good. Frictional investigations have shown that, in comparison to the benchmark (untextured samples), the 3D-microtextured samples do not induce any significant improvements in the coefficient of friction (COF) under oil-lubricated conditions, but that under antifriction coated conditions, significant improvements in the friction coefficients may be achieved. Wear-based tribological tests have shown that the antifriction coating on benchmark samples was completely depleted, which greatly influenced their friction and wear behavior, since steel-steel contact occurred during testing. For the 3D-microtexture, the antifriction coating was also partially depleted; however, it accumulated itself in the microtexture which acted as a potential lubricant reservoir.

We present technological issues in the deposition of diamond films on gallium nitride (GaN) membranes. Many wrinkles and thicker diamond layers were observed at the membrane center and poor quality diamond outside the membrane area. The deflection of the membranes was analyzed by a bulging method using white light interferometry. The membrane bending is discussed in the terms of temperature gradient and mismatch of thermal expansion coefficients of materials.

Decellularized articular cartilage of human origin presents itself as the most homologous filling material for focal cartilage defects. Yet, the full repopulation of the exceptionally dense collagen construct has never been achieved without providing host cells with artificially created migration paths into the matrix. Within this study, we examine the use of a femtosecond laser to engrave fine patterns into human articular cartilage before decellularization and GAG depletion (decell‐deGAG). Scaffolds were tested for decellularization success and mechanical behavior. Seeding tests were performed to assess biocompatibility and examine the performance in a simulated defect environment using an osteochondral plug model in vitro and in vivo in an ectopic nude mouse model. The composition and structure of the newly formed repair tissue and macrophage recruitment were observed via histology. The femtosecond laser was successful in engraving deep, fine structures into the matrix without the thermal damage found with other laser techniques. Engraving was also beneficial for decellularization success. The resulting decell‐deGAG scaffold featured a compressive modulus many times stronger than other biomaterials commonly used for cartilage regeneration and presents a defect filling material that is similar to the tissue it is meant to replace. Moreover, the incisions promoted the repopulation with therapeutically relevant cells. A favorable spatial environment inside the incisions facilitated the formation of repair tissue that mimics hyaline cartilage in composition and collagen orientation. Scaffolds were well‐integrated within simulated defects. Femtosecond laser–engraved cartilage poses an authentic defect filling material with cartilage‐like properties. When used in combination with cell seeding, it promotes the formation of differentiated repair tissue. Thus, the hereby presented biomaterial shows great potential in improving the repair of focal cartilage defects and reducing long‐term graft failures.