A six-channel fan-shaped integrated narrow-band filter on a silicon substrate was designed on the basis of the Fabray–Perot (FP) theory and was fabricated using e-beam thermal evaporation. The central wavelength was modulated by modifying the FP cavity thickness using the combination mask method. Germanium and zinc sulfide were selected as the high and low refractive index film materials, respectively. Its average peak transmission reached 83.3%, the cut-off transmittance was less than 1%, and the full width at half maximum (FWHM) changed from 55 and 94 nm, and the central wavelength positioning accuracy error was less than 0.35%. Furthermore, transmittance was also calculated inversely, using the thickness of each layer of films, in order to deduce the reason of the decrease in peak transmittance. Thickness deviation of each layer and interface scattering contributed to the decrease of peak transmittance. Compared with the same type of products in the market, our filter showed better properties than that of some published and commercial filter.

The growth mechanism of nanocolumnar silver thin film deposited on a smooth silicon substrate using electron beam evaporation process at an oblique angle was simulated with the Kinetic Monte Carlo method. Following the simulated silver nanostructured thin film, a further computational simulation was done using COMSOL for surface-enhanced Raman scattering effects. The simulation results were compared against corresponding experimental results, which demonstrated high agreement between simulation results and experimental data. It was found that as the incident deposition angle increased, the density of the Ag thin film significantly decreased and the surface roughness increased. When the incident deposition angle was at 75° and 85°, the resulting nanocolumnar structure was significantly tilted. For Ag thin films deposited at all investigated angles, surface-enhanced Raman scattering effects were observed. Particularly, the Ag nanocolumns deposited at 85° showed remarkable Surface-enhanced Raman Scattering effects. This was seen in both COMSOL simulations and experimental results: Enhancement factors were 2 × 10⁷ in COMSOL simulation and 3.3 × 10⁵ in the experiment.