Optical solid state deflectors rely on the electro-optical or acousto-optic effect. These Electro-Optical Deflectors (EODs) and Acousto-Optical Deflectors (AODs) do not contain moving parts and therefore exhibit high deflection velocities and are free of drawbacks associated with mechanical scanners. A description of the principles of operation of EODs and AODs is presented. In addition, characteristics, properties and the (dis)advantages of EODs and AODs, when compared to mirror based mechanical deflectors, is discussed. Deflection angles, speed and accuracy are discussed in terms of resolvable spots and related quantities. Also, response time, damage threshold, efficiency and the type and magnitude of beam distortions is addressed. Optical deflectors are characterized by high angular deflection velocities, but small deflection angles. Whereas mechanical mechanical scanners are characterized by relatively small deflection velocities, but large deflection angles. Arranging an optical deflector and a mechanical scanner in series allows to take advantage of the best of both worlds

The finite-difference time-domain (FDTD) method is used to study the inhomogeneous absorption of linearly polarized laser radiation below a rough surface. The results are first analyzed in the frequency domain and compared to the efficacy factor theory of Sipe and coworkers. Both approaches show that the absorbed energy shows a periodic nature, not only in the direction orthogonal to the laser polarization, but also in the direction parallel to it. It is shown that the periodicity is not always close to the laser wavelength for the perpendicular direction. In the parallel direction, the periodicity is about $\lambda${}/Re(n\ifmmode \tilde{}\else \~{}\fi{}), with n\ifmmode \tilde{}\else \~{}\fi{} being the complex refractive index of the medium. The space-domain FDTD results show a periodicity in the inhomogeneous energy absorption similar to the periodicity of the low- and high-spatial-frequency laser-induced periodic surface structures depending on the material's excitation.

A model predicting the formation of laser-induced periodic surface structures (LIPSSs) is presented. That is, the finite-difference time domain method is used to study the interaction of electromagnetic fields with rough surfaces. In this approach, the rough surface is modified by “ablation after each laser pulse,” according to the absorbed energy profile, in order to account for inter-pulse feedback mechanisms. LIPSSs with a periodicity significantly smaller than the laser wavelength are found to “grow” either parallel or orthogonal to the laser polarization. The change in orientation and periodicity follow from the model. LIPSSs with a periodicity larger than the wavelength of the laser radiation and complex superimposed LIPSS patterns are also predicted by the model.