<!-- *** Custom HTML *** --> We explored the design of an optical pressure sensor. The objective is to create a photonic microelectromechanical system-based cantilever sensor design to detect prostate-specific antigen, a protein biomarker associated with prostate cancer. Sensor’s performance for the early detection of cancerous cells is dependent on sensitivity. The designed sensor consists of a hexagonal ring integrated with microcantilevers. Two types of microcantilever such as rectangular profile and V profile with integrated photonic sensing layer are investigated for sensitivity, quality factor, and resonant wavelength. The analysis shows that a geometrical modification of microcantilever has a significant effect on sensitivity enhancement. The finite difference time domain tool is used for designing photonic ring resonator patches. Numerical analysis of microcantilever is considered to investigate surface stress behavior. The cantilever deformation due to applied pressure resulted in a change in the index of refraction. Results show that the sensitivity of 55 nm / MPa for a triangular-shaped microcantilever obtained is higher compared to the rectangular-shaped microcantilever with a sensitivity of 0.19 nm / MPa. The designed structures have significantly higher sensitivities than the previously published sensitivity of 3.27 nm / MPa at wavelength 1550 nm. The maximum quality factor obtained for the rectangular shape is 2852 and 77,510 for the triangular shape. Triangular-shaped microcantilever can minimize winding inflexibility or stiffness. This capability of the triangular-shaped microcantilever enhances feasibility in making the final packaging and future fabrication.

Proposed work here consists of Micro Opto Electro Mechanical System based pressure sensor integrated with ring resonators. Single, double and triple ring resonators are integrated with photonic crystal sensing layer have been investigated for different sensitivity and minimum detectability by coupling FEA modelling with optical system. Photonic crystal sensing layer is modelled using Ansys Multiphysics for modelling and analysis. For applied pressure in the range of 1Mpa to 6Mpa, deformation and Maximum stress developed in different direction is calculated. Influence of mechanical deformation and stress developed during application of pressure for peak resonance wavelength shift is explored for each combination of ring resonators. Minimum observable deformation of $1.0073\mu \mathrm{m}$ for single ring resonator at pressure of $6.3\mu \mathrm{Pa}$ . Deformation of $1.051\mu \mathrm{m}$ for double ring resonator at pressure of $6.5\ \mu \mathrm{Pa}$ and $1.009\ \mu \mathrm{m}$ deformation for triple ring resonator at pressure of $6.9\ \mu \mathrm{Pa}$ is detected. Maximum sensitivity of 450nm/RIU and Quality factor of 12,245 is observed for single ring resonator. Proposed type of sensor investigation having remarkable application in biomedical instruments with appropriate design.