Zhen Zhang

Prof. Zhen Zhang

Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

Research Focus & Metrics

Academic Career Length

19Years (2008-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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25 October 2023 in IEEE/ASME Transactions on Mechatronics
Verified
Journal Article
Closed access
Yijie LiuYijie Liu
Yijie Liu
XLXuexuan Li
Xuexuan Li
LGLin Ge
Lin Ge
ZZZhen Zhang
Zhen Zhang
Scanning probe lithography (SPL) is a versatile nanofabrication method that employs a scanning probe microscope (SPM) to generate patterns and nanoscale structures on surfaces. Typically, an atomic force microscope (AFM) is the preferred type of SPM for nanolithography and in situ characterization based on the probe–sample interaction. However, the maximum area of the existing SPL is mainly limited by scanner stroke of the AFM and usually less than $100\times 100$ μm $^{2}$ . Ultralarge-area nanofabrication can be achieved by using a “step and scan” manner but leading to stitching errors and low throughput. This article proposes a novel ultralarge-area stitchless SPL and high-throughput in situ characterization system utilizing a leaf spring-based nanomanipulator, which offers a maximum scanning area of $2\times 2$ mm $^{2}$ . Further, we propose a novel optimized passband loss filter for the repetitive control of the nanomanipulator to realize high-bandwidth and high-precision trajectory tracking. Experimental results indicate that the proposed control method achieves satisfactory tracking performance for a triangular wave with an amplitude of 500 μm. Compared with the existing SPL systems, we achieve stitchless nanolithography at a speed of $\sim $ 2 mm/s and high-throughput in situ characterization in the range of $500\times 500$ μm $^{2}$ . This system opens up significant avenues for the research and application of ultralarge-area nanofabrication and in situ characterization.

1 May 2020 in Applied Surface Science
Verified
Journal Article
Closed access
YLYuhang Li
Yuhang Li
ZZZhen Zhang
Zhen Zhang
Yingchun GuanYingchun Guan
Yingchun Guan

1 October 2018 in Optics & Laser Technology
Verified
Journal Article
Closed access
LLLibin Lu
Libin Lu
ZZZhen Zhang
Zhen Zhang
Yingchun GuanYingchun Guan
Yingchun Guan
HZHongyu Zheng
Hongyu Zheng

23 August 2023 in Small
Verified
Journal Article
Closed access
Yijie LiuYijie Liu
Yijie Liu
XLXuexuan Li
Xuexuan Li
YZYuliang Zhang
Yuliang Zhang
LGLin Ge
Lin Ge
Yingchun GuanYingchun Guan
Yingchun Guan
ZZZhen Zhang
Zhen Zhang

1 June 2019 in Applied Surface Science
Verified
Journal Article
Closed access
YLYuhang Li
Yuhang Li
Yingchun GuanYingchun Guan
Yingchun Guan
ZZZhen Zhang
Zhen Zhang
SYShoufeng Ynag
Shoufeng Ynag

1 November 2021 in Precision Engineering
Verified
Journal Article
Closed access
Yijie LiuYijie Liu
Yijie Liu
ZZZhen Zhang
Zhen Zhang