This paper presents a thermal convection–based sensor fabricated using simple microelectromechanical systems (MEMS)-based processes. This sensor can be applied to both acceleration and inclination measurements without modifying the structure. Because the operating mechanism of the accelerometer is the thermal convection of a gas medium, a simple model is proposed and developed in which the performance of the thermal convection–based accelerometer is closely associated with the Grashof number, G_r and the Prandtl number, P_r. This paper discusses the experiments that were performed by varying several parameters such as the heating power, cavity size, gas media, and air pressure. The experimental results demonstrate that an increase in the heating power, pressure, and cavity size leads to an increase in the accelerometer sensitivity. However, an increase in the pressure and/or cavity size results in a decrease in the frequency bandwidth. This paper also discusses the fact that a working-gas medium with a large thermal diffusivity and small kinematic viscosity can widen the frequency bandwidth and increase the sensitivity, respectively.

A tunable Fabry-Perot interferometer (TFPI)-type wavelength filter designed for the long-wavelength infrared (LWIR) region is fabricated using micro electro mechanical systems (MEMS) technology and the novel polydimethylsiloxane (PDMS) micro patterning technique. The structure of the proposed infrared sensor consists of a Fabry-Perot interferometer (FPI)-based optical filter and infrared (IR) detector. An amorphous Si-based thermal IR detector is located under the FPI-based optical filter to detect the IR-rays filtered by the FPI. The filtered IR wavelength is selected according to the air etalon gap between reflectors, which is defined by the thickness of the patterned PDMS. The 8 μm-thick PDMS pattern is fabricated on a 3 nm-thick Al layer used as a reflector. The air etalon gap is changed using the electromagnetic force between the permanent magnet and solenoid. The measured PDMS gap height is about 2 μm, ranging from 8 μm to 6 μm, with driving current varying from 0 mA to 600 mA, resulting in a tunable wavelength range of 4 μm. The 3-dB bandwidth (full width at half maximum, FWHM) of the proposed filter is 1.5 nm, while the Free Spectral Range (FSR) is 8 μm. Experimental results show that the proposed TFPI can detect a specific wavelength at the long LWIR region.