This paper reports an uncooled infrared (IR) detector based on a micromachined piezoelectric resonator operating in resonant and resistive dual-modes. The two sensing modes achieved IR responsivities of 2.5 Hz/nW and 900 μdB/nW, respectively. Compared with the single mode operation, the dual-mode measurement improves the limit of detection by two orders of magnitude and meanwhile maintains high linearity and responsivity in a higher IR intensity range. A combination of the two sensing modes compensates for its own shortcomings and provides a much larger dynamic range, and thus, a wider application field of the proposed detector is realized.

Micro-nano optomechanical accelerometers are widely used in automobile, aerospace, and other industrial applications. Here, we fabricate mechanical sensing components based on an electrically pumped GaN light-emitting diode (LED) with a beam structure. The relationship between the blueshift of the electroluminescence (EL) spectra and the deformation of the GaN beam structure based on the quantum-confined Stark effect (QCSE) of the InGaN quantum well (QW) structure is studied by introducing an extra mass block. Under the equivalent acceleration condition, in addition to the elastic deformation of GaN-LED, a direct relationship exists between the LED’s spectral shift and the acceleration’s magnitude. The extra mass block (gravitational force: 7.55×10⁻¹¹ N) induced blueshift of the EL spectra is obtained and shows driven current dependency. A polymer sphere (PS; gravitational force: 3.427×10⁻¹² N) is placed at the center of the beam GaN-LED, and a blueshift of 0.061 nm is observed in the EL spectrum under the injection current of 0.5 mA. The maximum sensitivity of the acceleration is measured to be 0.02 m/s², and the maximum measurable acceleration is calculated to be 1.8×10⁶ m/s². It indicates the simultaneous realization of high sensitivity and a broad acceleration measurement range. This work is significant for several applications, including light force measurement and inertial navigation systems with high integration ability.

Micro-LED arrays exhibit high brightness, a long lifespan, low power consumption, and a fast response speed. In this paper, we have proposed a series-biased micro-LED array by using a nitride layer with multi-quantum wells epitaxial on sapphire substrate. The III-nitride multiple quantum wells serving as the micro-LED active material enable both luminescence and detection functionalities. The micro-LED array combines lighting, detection, and communication capabilities. We have conducted a thorough analysis of the micro-LED array’s optoelectronic features in both lighting and detection modes. We also explore visible light communication performance across different arrangements of single micro-LED devices within the series-biased array. Our research achieves 720p video transmission via visible light communication using the micro-LED array, supporting a communication rate of up to 10 Mbps. Our contributions encompass the successful integration of lighting and detection functions and a comprehensive assessment of optoelectronic and communication performance. This study highlights the multifunctional micro-LED array’s potential as a transceiver terminal in visible light communication systems, expanding its applications from smart lighting to visible light communication and photonic integrated chips. These innovations enhance our understanding of micro-LED technology and its versatile applications.