A simple linear electromechanical model for an electrostatically driven resonating cantilever is derived. The model has been developed in order to determine dynamic quantities such as the capacitive current flowing through the cantilever-driver system at the resonance frequency, and it allows us to calculate static magnitudes such as position and voltage of collapse or the voltage versus deflection characteristic. The model is used to demonstrate the theoretical sensitivity on the attogram scale of a mass sensor based on a nanometre-scale cantilever, and to analyse the effect of an extra feedback loop in the control circuit to increase the Q factor.

Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems have been designed to have resonance frequencies up to 1.5 MHz. The systems have been characterized in ambient air and vacuum conditions and display ultrasensitive mass detection in air. A mass sensitivity of $4\mathrm{ag}∕\mathrm{Hz}$ has been determined in air by placing a single glycerine drop, having a measured weight of 57 fg, at the apex of a cantilever and subsequently measuring a frequency shift of 14.8 kHz. CMOS integration enables electrostatic excitation, capacitive detection, and amplification of the resonance signal directly on the chip.

A simulation study has been performed to analyze resistive switching (RS) phenomena in valence change memories (VCM) based on a HfO ₂ dielectric. The kernel of the simulation tool consists of a 3D kinetic Monte Carlo (kMC) algorithm implemented self-consistently with the 3D Poisson and heat equations. These VCM devices show filamentary conduction, their RS operation is based on the destruction and regeneration of an ohmic conductive filament (CF) composed of oxygen vacancies. The physics underlying the RS operation is described by means of processes linked to generation of oxygen vacancies, oxygen ion migration and recombination between vacancies and oxygen ions that can be accurately described by using the electric field and temperature distributions in the dielectric. The studied devices consist of TiN/Ti/HfO ₂ /W stacks where the Ti capping layer plays the role of oxygen ion getter material. The simulation tool is useful for obtaining information of internal physical variables, explaining RS dynamics and the CFs evolution from the microscopic viewpoint in terms of their size and shape under different electrical input signals; particularly, the pulsed operation regime has been studied in depth. Furthermore, interesting phenomena, such as partial SETs within overall RESET processes can be accurately reproduced.