Electronic skin made of thin, soft, stretchable devices that can mimic the human skin and reconstruct the tactile sensation and perception offers great opportunities for prosthesis sensing, robotics controlling, and human-machine interfaces. Advanced materials and mechanics engineering of thin film devices has proven to be an efficient route to enable and enhance flexibility and stretchability of various electronic skins; however, the density of devices is still low owing to the limitation in existing fabrication techniques. Here, we report a high-throughput one-step process to fabricate large tactile sensing arrays with a sensor density of 25 sensors/cm 2 for electronic skin, where the sensors are based on intrinsically stretchable piezoelectric lead zirconate titanate (PZT) elastomer. The PZT elastomer sensor arrays with great uniformity and passive-driven manner enable high-resolution tactile sensing, simplify the data acquisition process, and lower the manufacturing cost. The high-throughput fabrication process provides a general platform for integrating intrinsically stretchable materials into large area, high device density soft electronics for the next-generation electronic skin.
24 February 2020 in Microsystems & Nanoengineering
Conventional electroporation approaches show limitations in the delivery of macromolecules in vitro and in vivo. These limitations include low efficiency, noticeable cell damage and nonuniform delivery of cells. Here, we present a simple 3D electroporation platform that enables massively parallel single-cell manipulation and the intracellular delivery of macromolecules and small molecules. A pyramid pit micropore array chip was fabricated based on a silicon wet-etching method. A controllable vacuum system was adopted to trap a single cell on each micropore. Using this chip, safe single-cell electroporation was performed at low voltage. Cargoes of various sizes ranging from oligonucleotides (molecular beacons, 22 bp) to plasmid DNA (CRISPR-Cas9 expression vectors, >9 kb) were delivered into targeted cells with a significantly higher transfection efficiency than that of multiple benchmark methods (e.g., commercial electroporation devices and Lipofectamine). The delivered dose of the chemotherapeutic drug could be controlled by adjusting the applied voltage. By using CRISPR-Cas9 transfection with this system, the p62 gene and CXCR7 gene were knocked out in tumor cells, which effectively inhibited their cellular activity. Overall, this vacuum-assisted micropore array platform provides a simple, efficient, high-throughput intracellular delivery method that may facilitate on-chip cell manipulation, intracellular investigation and cancer therapy.
A microfluidic template method of fabricating nanowires with solution-processable semiconductors is demonstrated, which can be utilized for constructing nanowire-based devices.