Alois Herkommer is full professor for optical
design and simulation at the Institute for Applied Optics at the University of
Stuttgart since 2011. He received his
PhD in physics in 1995 from the University of Ulm in the area of quantum
optics. In 1996 he joined Carl Zeiss in Oberkochen and worked on the optical
design of high performance lithographic and metrology systems in various
positions until 2011. His main research interests are optical design of
imaging, illumination and metrology systems, novel optical systems concepts,
and additive optics fabrication.
Alois Herkommer is full professor for optical
design and simulation at the Institute for Applied Optics at the University of
Stuttgart since 2011. He received his
PhD in physics in 1995 from the University of Ulm in the area of quantum
optics. In 1996 he joined Carl Zeiss in Oberkochen and worked on the optical
design of high performance lithographic and metrology systems in various
positions until 2011. His main research interests are optical design of
imaging, illumination and metrology systems, novel optical systems concepts,
and additive optics fabrication.