To meet the measurement needs of multidimensional high-g acceleration in fields such as weapon penetration, aerospace, and explosive shock, a biaxial piezoresistive accelerometer incorporating tension–compression is meticulously designed. This study begins by thoroughly examining the tension–compression measurement mechanism and designing the sensor’s sensitive structure. A signal test circuit is developed to effectively mitigate cross-interference, taking into account the stress variation characteristics of the cantilever beam. Subsequently, the signal test circuit of anti-cross-interference is designed according to the stress variation characteristics of the cantilever beam. Next, the finite element method is applied to analyze the structure and obtain the performance indices of the range, vibration modes, and sensitivity of the sensor. Finally, the process flow and packaging scheme of the chip are analyzed. The results show that the sensor has a full range of 200,000 g, a sensitivity of 1.39 µV/g in the X direction and 1.42 µV/g in the Y direction, and natural frequencies of 509.8 kHz and 510.2 kHz in the X and Y directions, respectively.

Six-dimensional force/torque sensors are capable of measuring force and torque information in three directions in the Cartesian coordinate system. As an important end-effector for robots, force and torque information can be obtained by force sensors to achieve precise operation and flexible control. Aiming at the problem that existing mechanical fingertips mostly use one-dimensional force sensors, this paper designs a miniature three-dimensional cross-beam type six-dimensional force sensor for measuring mechanical fingertip contact force and force-torque measurements, using the cross-beam and floating beam to jointly detect signals, which realizes the separation of force and torque measurements and reduces the gap between force and torque measurement accuracy. The sensitivity and stiffness performance of the elastic structure are analyzed by finite element simulation, and the mesh-independent analysis ensures the relative accuracy of the simulation data. According to the results of the analysis, three main factors affecting the performance of the elastic structure were selected for response surface optimization, the DOE data were fitted with the least squares method and the MGPA algorithm was used to find the optimal results as follows: compared with the original model, the total deformation of the optimized elastic structure was improved by 6.8%, and the natural frequency was decreased by 0.61% only, which proved that this optimization scheme was effective.

To meet the high-precision measurement requirements of six-dimensional force/torque sensing at the fingertips of a dexterous hand, this study develops a strain-based six-dimensional force/torque sensor. The sensor elastomer adopts an L-shaped composite beam structure in a cross configuration, with the base and housing forming an overload protection structure. A mechanical model of the elastomer is established to analyze the stress – strain distribution, providing a theoretical basis for parameter optimization and strain gauge placement. The structural dimensions of the elastomer are optimized using a response surface method combined with a multi-objective optimization design, achieving improved sensitivity while maintaining sufficient stiffness. The development of the sensor prototype includes the mechanical structure, signal conditioning circuits, and the host computer interface. A static calibration device using weights and a dynamic calibration setup based on impact hammer excitation are established to evaluate the static and dynamic characteristics of the sensor prototype. Based on the calibration data, a stacking learning model is proposed for sensor decoupling, which effectively improves the measurement accuracy across all six dimensions and reduces cross-interference. Experimental results show that the sensor prototype exhibits good sensitivity and stiffness. The resolution in the force direction is 0.02 N, and in the torque direction is 4 N·mm. The sensitivities in the six dimensions are 0.188 mV/V, 0.223 mV/V, 0.296 mV/V, 0.889 mV/V, 0.704 mV/V, and 0.613 mV/V, respectively. After decoupling, the measurement error is less than 2%.