Due to the scarcity of fault samples in real-world industrial scenarios, few-shot fault diagnosis (FSFD) has attracted increasing attention, as it is vital for ensuring industrial safety and engineering reliability. However, existing metrics-based meta-learning approaches generally calculate fault similarity relying on global pairwise, which insufficiently exploit fault information and thus limit discrimination among fault types. To address the insensitivity to buried fault information in complete processes, we propose a novel framework called the local–global consistency relation network (LGCRN). The framework captures more comprehensive fault feature information through two components: the global branch, which focuses on macroinformation involving all join process units, and the local branch, which emphasizes finer granularity from specific units. In addition, a local–global alignment loss is utilized to optimize LGCRN, where self-cross relation improves the discriminability and stability of fault features by maintaining consistency between local and global branches. The self-cross relation comprises self-sample relation, ensuring consistency within the same sample at different granularities, and cross-sample relation, maintaining consistency across samples within the same class. Experiments on two benchmarks and a real semiconductor process demonstrate the feasibility and superiority of the proposed method, confirming its effectiveness in addressing limited-sample industrial fault diagnosis tasks and enabling timely maintenance crucial for operational safety in real-world scenarios.