Film cooling technology is of great significance to enhance the performance of aero-engines and extend service life. With the increasing requirements for film cooling efficiency, researchers and engineers have carried out a lot of work on the precision and digital measurement of cooling holes. Based on the above, this paper outlines the importance and principles of film cooling technology and reviews the evolution of cooling holes. Also, this paper details the traditional measurement methods of the cooling hole used in current engineering scenarios with their limitations and categorizes digital measurement methods into five main types, including probing measurement technology, optical measurement technology, infrared imaging technology, computer tomography (CT) scanning technology, and composite measurement technology. The five types of methods and integrated automated measurement platforms are also analyzed. Finally, through a generalize and analysis of cooling hole measurement methods, this paper points out technical challenges and future trends, providing a reference and guidance for forward researches.

High-aspect-ratio structures have become increasingly important in MEMS devices. In situ, real-time critical dimension and depth measurement for high-aspect-ratio structures is critical for optimizing the deep etching process. Through-focus scanning optical microscopy (TSOM) is a high-throughput and inexpensive optical measurement method for critical dimension and depth measurement. Thus far, TSOM has only been used to measure targets with dimension of 1 μm or less, which is far from sufficient for MEMS. Deep learning is a powerful tool that improves the TSOM performance by taking advantage of additional intensity information. In this work, we propose a convolutional neural network model-based TSOM method for measuring individual high-aspect-ratio trenches on silicon with width up to 30 μm and depth up to 440 μm. Experimental demonstrations are conducted and the results show that the proposed method is suitable for measuring the width and depth of high-aspect-ratio trenches with a standard deviation and error of approximately a hundred nanometers or less. The proposed method can be applied to the semiconductor field.

Film cooling technology is of great significance to enhance the performance of aero-engines and extend service life. With the increasing requirements for film cooling efficiency, researchers and engineers have carried out a lot of work on the precision and digital measurement of cooling holes. Based on the above, this paper outlines the importance and principles of film cooling technology, reviews the evolution of cooling holes. Also, this paper details the traditional measurement methods of the cooling hole used in current engineering scenarios with their limitations and categorizes digital measurement methods into five main types, including probing measurement technology, optical measurement technology, infrared imaging technology, computer tomography(CT) scanning technology, and composite measurement technology. The five types of methods and integrated automated measurement platforms are also analyzed. Finally, through a generalize and analysis of cooling hole measurement methods, this paper points out technical challenges and future trends, providing a reference and guidance for forward researches.

In frequency-sweep polarization-modulation ranging, distance is determined by the frequency of modulated waves and the corresponding wavelength multiple when emitted and returned waves are in phase. However, measurement of the frequency and the wavelength multiple is affected by thermally induced phase delay of the polarized wave. In this article we systematically discuss the principle of the ranging method and analyze the influences of thermally induced phase delay. New approaches to measurement are proposed to eliminate the impact on frequency and the wavelength multiple. Theoretical analysis and experimental results proved the efficiency and applicability of the methods.

The predecessor of China Optics was China Optics and Applied Optics Digest, which was founded in 1985. At that time, it was the only retrieval journal in the field of optics in China. At the end of 2008, China Optics and Applied Optics Digest was renamed 《中国光学》的前身是1985年创办的《中国光学与应用光学文摘》，当时是国内光学领域唯一的检索刊物。2008年底《中国光学与应用光学文摘》转型更名为《中国光学与应用光学》期刊，刊载内容突破了文摘的限制，正式成为学术刊物。

Absolute distance measurements based on optical frequency combs (OFCs) have greatly promoted advances in both science and technology, owing to the high precision, large non-ambiguity range (NAR), and a high update rate. However, cyclic error, which is extremely difficult to eliminate, reduces the linearity of measurement results. In this study, we quantitatively investigated the impact of cyclic error on absolute distance measurement using OFCs based on two types of interferometry: synthetic wavelength interferometry and single-wavelength interferometry. The numerical calculations indicate that selecting a suitable reference path length can minimize the impact of cyclic error when combining the two types of interferometry. Recommendations for selecting an appropriate synthetic wavelength to address the tradeoff between achieving a large NAR and minimizing the risk of failure when combining the two methods are provided. The results of this study are applicable not only in absolute distance measurements but also in other applications based on OFCs, such as surface profile, vibration analysis, etc.