We present a design of a tunable terahertz (THz) filter (TTF) used in an indoor communication system. The unit cell of TTF is composed of ring-shaped and cross-shaped nanostructures. By utilizing the micro-electro-mechanical system (MEMS) technique to modify the height between the ring-shaped and cross-shaped nanostructures in the incident transverse electric (TE) mode, the resonant frequencies can be tuned from 0.530 THz to 0.760 THz, which covers an atmospheric window from 0.625 THz to 0.725 THz for indoor wireless optical communication applications. This design of TTF provides an effective approach to select and filter specific signals. It makes the data processing more flexible at the transmission end of the communication system. Furthermore, such a TTF design can be realized the commercialization of communication system components due to its integrated circuit (IC) process compatibility, miniaturization and high flexibility.

The integration of micro-electro-mechanical system (MEMS) with metamaterial has provided a novel route to achieve programmability via its reconfigurable capabilities. Here, we propose and demonstrate a MEMS-based metadevice by using switchable winding-shaped cantilever metamaterial (WCM) for active logical modulation. WCM can be actuated by external driving voltage, and the logical modulation bit is performed by releasing MEMS cantilevers to represent “on” and “off” states. While the underneath substrate surface of a MEMS-based metadevice is rough after releasing the cantilevers, the metadevice is allowed to operate on the reconfigurable switching state and avoid the snapping down of the device when the system is overloaded. Such a reconfigurable and programmable MEMS-based metadevice exhibits multifunctional characteristics to simultaneously perform the logic operations of “OR” and “AND” gates. By exploiting the tuning mechanism of the MEMS-based metadevice, the arbitrary metamaterial configuration can be implanted into WCM. This opens a wide avenue to further enlarge the operating frequency range and applications in optoelectronic fields. These unique results provide various possibilities in multifunctional switching, active logical modulating, and optical computing applications.

In recent years, electromagnetic characteristics of metamaterials has aroused great interest because of innovative fundamental understanding as well as promising potential applications in optics, semiconductors, imaging, and sensing. We survey the state-of-the-art of spatially reconfigurable metamaterials in which electromagnetic Lorentz, Coulomb, and Ampere forces, as well as optical signals and thermal stimulation can be dynamically changed their optical properties. Electro-mechanical and optical inputs change the amplitude, phase, polarization of incident electromagnetic wave, and optical response within these metamaterials, which can be driven by electric or optical signals. Based on a solid theoretical foundation, we review the most recent experimental works on reconfigurable metamaterials endowed with an active tuning characteristic. Additionally, we review the potential metamaterial applications that may inspire new research works and offer a comparison to other optoelectronic fields.

We present two types of refractive index sensors by using tunable terahertz (THz) metamaterial (TTM) based on two concentric split-ring resonators (SRRs) with different splits. By modifying the distance between SRRs and substrate, TTM shows tunable single- and dual-resonance characteristic. The maximum tuning range of resonance is 0.432 THz from 0.958 THz to 1.390 THz. To demonstrate a great flexibility of TTM in real application, TTM device is exposed on the surrounding ambient with different refractive index (n). The sensitivity of TTM can be enhanced by increasing SRR height, which is increased from 0.18 THz/RIU to 1.12 THz/RIU under the condition of n = 1.1. These results provide a strategy to improve the sensing performance of the metamaterial-based sensing device by properly arranging the geometric position of meta-atoms. The proposed TTM device can be used for tunable filters, frequency-selective detectors, and tunable high-efficiency sensors in the THz frequency range.

A sickle-shaped metamaterial (SSM) based biochemical sensor with multiple resonances was investigated in the terahertz frequency range. The electromagnetic responses of SSM were found to be four resonances, namely dipolar, quadrupolar, octupolar and hexadecapolar plasmon resonances. They were generated from the interactions between SSM and perpendicularly incident terahertz waves. The sensing performances of SSM-based biochemical sensors were evaluated by changing ambient environments and analyte varieties. The highest values of sensitivity and figure of merit (FOM) for SSM covered with analyte thin-films were 471 GHz/RIU (refraction index unit) and 94 RIU⁻¹, respectively. In order to further investigate the biosensing ability of the proposed SSM device, dielectric hemispheres and microfluidic chips were adopted to imitate dry and hydrous biological specimens, respectively. The results show that the sensing abilities of SSM-based biochemical sensors could be enhanced by increasing either the number of hemispheres or the channel width of the microfluidic chip. The highest sensitivity was 405 GHz/RIU for SSM integrated with microfluidic chips. Finally, three more realistic models were simulated to imitate real sensing situations, and the corresponding highest sensitivity was 502 GHz/RIU. The proposed SSM device paves the way to possible uses in biochemical sensing applications.