Piezoelectric vibration energy harvesters have drawn much interest for powering self-sustained electronic devices. Furthermore, the continuous push toward miniaturization and higher levels of integration continues to form key drivers for autonomous sensor systems being developed as parts of the emerging Internet of Things (IoT) paradigm. The synchronized switch harvesting (SSH) on inductor and synchronous electrical charge extraction are two of the most efficient interface circuits for piezoelectric energy harvesters; however, inductors are indispensable components in these interfaces. The required inductor values can be up to 10 mH to achieve high efficiencies, which significantly increase overall system volume, counter to the requirement for miniaturized self-power systems for IoT. An inductorless bias-flip rectifier is proposed in this paper to perform residual charge inversion using capacitors instead of inductors. The voltage flip efficiency goes up to 80% while eight switched capacitors are employed. The proposed SSH on capacitors circuit is designed and fabricated in a 0.35-μm CMOS process. The performance is experimentally measured and it shows a 9.7x performance improvement compared with a full-bridge rectifier for the case of a 2.5-V open-circuit zero-peak voltage amplitude generated by the piezoelectric harvester. This performance improvement is higher than most of the reported state-of-the-art inductor-based interface circuits, while the proposed circuit has a significantly smaller overall volume enabling system miniaturization.

Piezoelectric vibration energy harvesting has drawn much interest to power distributed wireless sensor nodes for Internet of Things (IoT) applications where ambient kinetic energy is available. For certain applications, the harvesting system should be small and able to generate sufficient output power. Standard rectification topologies such as the full-bridge rectifier are typically inefficient when adapted to power conditioning from miniaturized harvesters. Therefore, active rectification circuits have been researched to improve overall power conversion efficiency, and meet both the output power and miniaturization requirements while employing a MEMS harvester. In this paper, a MEMS piezoelectric energy harvester is designed and co-integrated with an active synchronized switch harvesting on inductor (SSHI) rectification circuit designed in a CMOS process to achieve high output power for system miniaturization. The system is fully integrated on a nail-size board, which is ready to provide a stable DC power for low-power mini sensors. A MEMS energy harvester of 0.005cm3 size, co-integrated with the CMOS conditioning circuit, outputs a peak rectified DC power of 40.6μ W and achieves a record DC power density of 8.12mW/cm3 when compared to state-of-the-art harvesters.

A triboelectric nanogenerator (TENG) is a new transducer utilizing contact electrification and electrostatic induction to transform mechanical energy into electric energy. Due to its high energy density and flexibility, it can be employed to make electronic devices self-powered by harvesting ambient mechanical energy in many application scenarios, such as biomedical devices, wearable electronics, and Internet-of-Things (IoT) sensors. However, due to the time-varying and low internal capacitance of a TENG, it is challenging to extract electrical energy from it. Hence, good power conversion techniques are crucial in TENG energy harvesting systems. Currently, studies on dedicated integrated power conversion techniques are very limited. Due to the exponentially increasing research interests in TENG, a comprehensive study on the TENG energy harvesting system, emphasizing integrated-circuit (IC) power conversion techniques, is urgently needed. This paper summarizes and compares the state-of-the-art triboelectric energy harvesting systems, focusing on different power conversion techniques for output power enhancement. Some techniques, which have been widely used in other relevant energy harvesting systems, are also mentioned to inspire innovative design strategies for TENG systems.

An electrostatically actuated non-linear microelectromechanical systems (MEMS) resonator can describe double hysteresis behavior in the measured frequency response due to the interplay between electrical and mechanical non-linearities in the system. This paper provides the first experimental mapping of the stable and unstable branches of the frequency response of a MEMS resonator describing a double hysteretic frequency response using a closed-loop phase feedback oscillator. Furthermore, the frequency stability of the oscillator is compared for varying amplitude and phase feedback conditions, and it is experimentally demonstrated that parametric noise up-conversion can be suppressed in such a system by suitably biasing the resonator at one of the four bifurcation points in such a system. This result is qualitatively consistent with theoretical prediction and demonstrates that improved frequency stability in a non-linear MEMS oscillator is possible by suitably biasing the resonator using simultaneous amplitude and phase feedback.

In this paper, we present the strongly nonlinear behavior of a 2-degree-of-freedom weakly coupled microelectromechanical systems (MEMS) resonator system in a mixed nonlinear regime, using a closed-loop phase feedback oscillator approach. Three out of four nonlinear bifurcation points within a strongly nonlinear coupled resonator system, with both electrical and mechanical nonlinearities, were revealed. Furthermore, we are able to study the amplitude and frequency stabilities of the resulting system when biased at the bifurcation points. Specifically, we discover that, as compared with the linear case, orders of magnitude improvement in amplitude and frequency signal resolution can be observed at the nonlinear bifurcation points, demonstrating that coupled nonlinear MEMS resonators can be useful for enhancing the amplitude and frequency stability for relevant applications. [2017-0092]

Piezoelectric vibration energy harvesting is becoming a promising solution to power wireless sensors and portable electronics. While miniaturizing energy harvesting systems, rectified power efficiencies from miniaturized piezoelectric transducers (PTs) are usually decreased due to insufficient voltage levels generated by the PTs. In this paper, a monolithic PT is split into several regions connected in series. The raw electrical output power is kept constant for different connection configurations, as theoretically predicted. However, the rectified power following a full-bridge rectifier (FBR), or a synchronized switch harvesting on an inductor (SSHI) rectifier, is significantly increased due to the higher voltage/current ratio of series connections. This is an entirely passive design scheme without introducing any additional quiescent power consumption, and it is compatible with most of the state-of-the-art interface circuits. Detailed theoretical derivations are provided to support the theory, and the results are experimentally evaluated using a custom microelectromechanical system PT and a complementary metal-oxide-semiconductor rectification circuit. The results show that, while a PT is split into eight regions connected in series, the performance while using an FBR and an SSHI circuit is increased by 2.3× and 5.8×, respectively, providing an entirely passive approach to improving energy conversion efficiency.