Optical frequency combs have resulted in significant advances in optical frequency metrology and found wide applications in precise physical measurements and molecular fingerprinting. A direct analogue of frequency combs in the phononic or acoustic domain has not been reported to date. In this Letter, we report the first clear experimental evidence for a phononic frequency comb. We show that the phononic frequency comb is generated through the intrinsic coupling of a driven phonon mode with an autoparametrically excited subharmonic mode. The experiments depict the comb generation process evidenced by a spectral response consisting of equally spaced discrete and phase coherent comb lines. Through systematic experiments at different drive frequencies and amplitudes, we portray the well-connected process of phononic frequency comb formation and define the attributes to control the features associated with comb formation in such a system. In addition to the demonstration of frequency comb, the interplay between the nonlinear resonances and the well-known Duffing phenomenon is also observed.

Piezoelectric vibration energy harvesters have drawn much interest for powering self-sustained electronic devices. Furthermore, the continuous push toward miniaturization and higher levels of integration continues to form key drivers for autonomous sensor systems being developed as parts of the emerging Internet of Things (IoT) paradigm. The synchronized switch harvesting (SSH) on inductor and synchronous electrical charge extraction are two of the most efficient interface circuits for piezoelectric energy harvesters; however, inductors are indispensable components in these interfaces. The required inductor values can be up to 10 mH to achieve high efficiencies, which significantly increase overall system volume, counter to the requirement for miniaturized self-power systems for IoT. An inductorless bias-flip rectifier is proposed in this paper to perform residual charge inversion using capacitors instead of inductors. The voltage flip efficiency goes up to 80% while eight switched capacitors are employed. The proposed SSH on capacitors circuit is designed and fabricated in a 0.35-μm CMOS process. The performance is experimentally measured and it shows a 9.7x performance improvement compared with a full-bridge rectifier for the case of a 2.5-V open-circuit zero-peak voltage amplitude generated by the piezoelectric harvester. This performance improvement is higher than most of the reported state-of-the-art inductor-based interface circuits, while the proposed circuit has a significantly smaller overall volume enabling system miniaturization.

This paper introduces a differential vibrating beam MEMS accelerometer demonstrating excellent long-term stability for applications in gravimetry and seismology. The MEMS gravimeter module demonstrates an output Allan deviation of 9 μGal for a 1000 s integration time, a noise floor of 100 μGal/√Hz, and measurement over the full ±1 g dynamic range (1 g = 9.81 ms⁻²). The sensitivity of the device is demonstrated through the tracking of Earth tides and recording of ground motion corresponding to a number of teleseismic events over several months. These results demonstrate that vibrating beam MEMS accelerometers can be employed for measurements requiring high levels of stability and resolution with wider implications for precision measurement employing other resonant-output MEMS devices such as gyroscopes and magnetometers.

In an array of identical resonators coupled through weak springs, a small perturbation in the structural properties of one of the resonators strongly impacts coupled oscillations causing the vibration modes to localize. Theoretical studies show that measuring the variation in eigenstates due to such vibration-mode localization can yield orders of magnitude enhancement in signal sensitivity over the technique of simply measuring induced resonant-frequency shifts. In this paper, we propose the application of mode localization for detecting small perturbations in stiffness in pairs of nearly identical weakly coupled microelectromechanical-system resonators and also examine the effect of initial mechanical asymmetry caused by fabrication tolerances in such sensors. For the first time, the variation in eigenstates is studied by coupling the resonators using electrostatic means that allow for significantly weaker coupling-spring constants and the possibility for stronger localization of vibration modes. Eigenstate variations that are nearly three orders of magnitude greater than the corresponding shifts in the resonant frequency for an induced perturbation in stiffness are experimentally demonstrated. Such high electrically tunable parametric sensitivities, together with the added advantage of intrinsic common-mode rejection, pave the way to a new paradigm of mechanical sensing.

Even though synchronization in autonomous systems has been observed for over three centuries, reports of systematic experimental studies on synchronized oscillators are limited. Here, we report on observations of internal synchronization in coupled silicon micromechanical oscillators associated with a reduction in the relative phase random walk that is modulated by the magnitude of the reactive coupling force between the oscillators. Additionally, for the first time, a significant improvement in the frequency stability of synchronized micromechanical oscillators is reported. The concept presented here is scalable and could be suitably engineered to establish the basis for a new class of highly precise miniaturized clocks and frequency references.