In order to improve the cutting performance in broaching, the lubrication and cleaning effects offered by water-based cutting fluids with green additives need to be studied from the viewpoint of green manufacturing. Therefore, water-based solutions with castor oil, surfactant (linear alkylbenzene sulfonate, LAS), and nanographite were prepared by ultrasonic agitation and sprayed into the zone of broaching via atomization. The performances of the cutting fluids, in terms of the viscosity, specific heat, wetting angle, and droplet size, were evaluated to discuss their effects on the broaching load. Among the fluids, the addition of LAS into oil-in-water (WO-S), where its cutting fluid with 10 wt.% castor oil and 1.5 wt.% surfactant, exhibited the lowest broaching force. With regard to the lubricating and cleaning mechanisms, WO-S has good wettability and permeability, and hence, can lubricate the cutting edge of the tool to decrease the cutting load, cool the cutting edge to keep it sturdy, and clean the surface of the cutting edge to keep it sharp. The results reveal that the simultaneous addition of castor oil and LAS had remarkable effects on the lubrication and cleaning, and resulted in a broaching load reduction of more than 10% compared to commercial cutting fluids. However, the addition of nanographite could not improve the lubrication owing to its agglomeration.

Milling plays a significant role in the machining of aluminum alloy parts. However, in the milling process, the material easily adheres to the tip of the milling tool due to the high ductility and thermal deformation of the aluminum alloy; the machining efficiency and quality are hard to further improve. Hence, in order to promote the machining performances, three textures (linear, wavy, and micropitted) are prepared, respectively, on rake face of milling tools using the laser processing system. Then, milling load, top‐burrs, and surface quality are chosen to discuss the machining performance of textured milling tools. In particular, the top‐burrs are investigated by relative area ratio of top‐burrs (RARB) which is calculated from the micrograph after binarization. The obtained results evidently show that the wavy textured milling tool reduces the milling load by an amount of 10.7% compared to the nontextured milling tool. This is due to the smaller contact area that reduces the internal friction of the tool‐chip contact area and thus reduces the load. And surface roughness improves by an amount of 23.8% because the wavy texture has the largest proportion of the unit area, and it can effectively improve the storage capacity of debris. Therefore, the wavy texture proposed in this research is of great reference value for the optimization of the machining performance of the milling tool.

Semiconductor cleaning system ultra-clean flow control pumps are critical equipment in the semiconductor industry. Among them, the perfluoroalkoxy alkane (PFA) spring is a pivotal component to control the pump, and its dynamic performance is crucial to ensure the efficient operation of the system. However, the dynamic performance of the spring is often affected by the operating frequency. This paper studied the effect of different working frequencies on the dynamic property of the spring through compression-cycle experiments under uniaxial sinusoidal excitation. The force–displacement curves under different compression frequencies were fitted to obtain the dynamic stiffness of the PFA spring under different cyclic loading frequencies. The variation in the spring’s hysteresis coefficient was evaluated using the hysteresis curves of different cyclic loading conditions. After 2 million compression experiments, the changes in dynamic stiffness, hysteresis coefficient, and spring height were investigated. The obtained results revealed that, as the frequency increases, the dynamic stiffness of the spring increases. The hysteresis coefficient of the PFA spring is the largest at 10 Hz and the smallest at 6 Hz. Upon conducting 2 million compression tests, it was discovered that the dynamic stiffness experiences the greatest attenuation rate of 4.19% at a frequency of 8 Hz, whereas the hysteresis coefficient undergoes the largest attenuation of 42.1% at a frequency of 6 Hz. The results will help to improve the design and application level of PFA springs.

The spring system functions as a pivotal element of the check valve, with its compression performance significantly influencing the valve's time, flow stability, and other characteristics. Taking cues from conventional springs, a refined rectangular helical spring with integrated support features was thoroughly evaluated for its compression performance. The design approach for this spring was elucidated, encompassing the utilization of the Finite Element Method (FEM) to model its compression behavior. Additionally, a laboratory configuration was implemented to authenticate the findings derived from the FEM simulation. Subsequently, a comparative investigation was carried out between an engineered spring and a conventional spring subjected to analogous processing. The comparative analysis unveiled that the support-featured spring exhibited a diminished lateral offset of 2.84 mm (equivalent to a reduction of 10.1 %) and a force-displacement curve with narrower vibration intervals and smaller amplitudes. Moreover, it exhibited an enhanced force feedback of 17.5 % under identical compression displacement conditions.