The unique electronic properties of semiconductor nanowires, in particular silicon nanowires (SiNWs), are attractive for the label-free, real-time, and sensitive detection of various gases. Therefore, over the past two decades, extensive efforts have been made to study the gas sensing function of NWs. This review article presents the recent developments related to the applications of SiNWs for gas sensing. The content begins with the two basic synthesis approaches (top-down and bottom-up) whereby the advantages and disadvantages of each approach have been discussed. Afterwards, the basic sensing mechanism of SiNWs for both resistor and field effect transistor designs have been briefly described whereby the sensitivity and selectivity to gases after different functionalization methods have been further presented. In the final words, the challenges and future opportunities of SiNWs for gas sensing have been discussed.

Designing heterostructure materials at the nanoscale is a well-known method to enhance gas sensing performance. In this study, a mixed solution of zinc chloride and tin (II) chloride dihydrate, dissolved in ethanol solvent, was used as the initial precursor for depositing the sensing layer on alumina substrates using the ultrasonic spray pyrolysis (USP) method. Several ZnO/SnO₂ heterostructures were grown by applying different ratios in the initial precursors. These heterostructures were used as active materials for the sensing of H₂S gas molecules. The results revealed that an increase in the zinc chloride in the USP precursor alters the H₂S sensitivity of the sensor. The optimal working temperature was found to be 450 °C. The sensor, containing 5:1 (ZnCl₂: SnCl₂·2H₂O) ratio in the USP precursor, demonstrates a higher response than the pure SnO₂ (∼95 times) sample and other heterostructures. Later, the selectivity of the ZnO/SnO₂ heterostructures toward 5 ppm NO₂, 200 ppm methanol, and 100 ppm of CH₄, acetone, and ethanol was also examined. The gas sensing mechanism of the ZnO/SnO₂ was analyzed and the remarkably enhanced gas-sensing performance was mainly attributed to the heterostructure formation between ZnO and SnO₂. The synthesized materials were also analyzed by X-ray diffraction, scanning electron microscopy, energy-dispersive X-ray, transmission electron microscopy, and X-ray photoelectron spectra to investigate the material distribution, grain size, and material quality of ZnO/SnO₂ heterostructures.

The National Institute for Occupational Safety and Health (NIOSH) has established exposure limits for sulfur-based volatile components, particularly hydrogen sulfide (H ₂ S), at 20 ppm for an 8-hour exposure and 50 ppm for durations under 10 minutes. Detecting such toxic gases at low levels necessitates innovative sensor fabrication. This study introduces a unique sensor design, involving the direct thermophoretic deposition of SnO ₂ aerosol streams on one side and densely compacted SnO ₂ thick films via ultrasonic spray pyrolysis (UPS) on the other side, acting as a heater. Analyzing flame-made SnO ₂ particles using BET, XRD, and TEM techniques revealed highly crystalline particles approximately 8 nm in size. Methyl mercaptan (CH ₃ SH) and H ₂ S were employed as analyte gases, ranging from 20 ppb to 25 ppm and 20 ppb to 50 ppm, respectively. The results indicate that the flame-made SnO ₂ exhibits significant potential for developing gas sensors that are highly sensitive to CH ₃ SH and H ₂ S gases across a broad concentration range. The sensor demonstrates a linear increase in response at lower concentrations, saturating at concentrations exceeding 20 ppm. Consequently, highly sensitive gas sensors capable of detecting very low levels can be manufactured, suitable for machine learning applications in environmental monitoring, healthcare, and industrial safety.