Spin waves are collective perturbations in the orientation of the magnetic moments in magnetically ordered materials. Their rich phenomenology is intrinsically three-dimensional; however, the three-dimensional imaging of spin waves has so far not been possible. Here, we image the three-dimensional dynamics of spin waves excited in a synthetic antiferromagnet, with nanoscale spatial resolution and sub-ns temporal resolution, using time-resolved magnetic laminography. In this way, we map the distribution of the spin-wave modes throughout the volume of the structure, revealing unexpected depth-dependent profiles originating from the interlayer dipolar interaction. We experimentally demonstrate the existence of complex three-dimensional interference patterns and analyze them via micromagnetic modelling. We find that these patterns are generated by the superposition of spin waves with non-uniform amplitude profiles, and that their features can be controlled by tuning the composition and structure of the magnetic system. Our results open unforeseen possibilities for the study and manipulation of complex spin-wave modes within nanostructures and magnonic devices.

A new 3D process is proposed for inertial MEMS sensors where a thin transduction layer based on high-density surface-varying comb fingers, with nano-metric gaps, is patterned below a thick seismic mass layer. The objective is to achieve high-performance in a reduced footprint. An in-plane accelerometer is designed, fabricated with this new 3D process, and tested under acceleration. Initial fabricated devices demonstrate a full-scale range of ±160 g, 7 μg/Hz Brownian noise floor and more than 4 kHz bandwidth. These figures translate into a dynamic range of more than 150 dB (normalized to 1-Hz bandwidth) with an overall footprint of only 400x600 μm2.

In this work, a technique to improve the magnetic plucking for frequency up-conversion in piezoelectric energy harvesters is presented. The technique involves shielded magnets with Neodymium-iron-boron alloy polarized in the opposite direction on a main magnet. The phenomenon is investigated both at the computational and at the experimental level. Subsequently, simulations on a mesoscale piezoelectric energy harvester are presented which demonstrate a gain of 17 times if the magnets are shielded in comparison with the classical plucking (i.e. without shielding). The technique finds useful applications and benefits in the field of low-speed and low-frequency vibration energy harvesting, as well as in actuation and sensing.

The exceptional magnetic, optical and phononic properties of Yttrium Iron Garnet (YIG) make it unique for spin-wave based and photonic applications. Yet, nanostructuring crystalline YIG and manipulating its magnetism in a non-destructive way is an outstanding challenge, and so far mostly limited to two-dimensional capabilities. Here, we show that irradiation of single-crystal YIG films with a focused UV laser drives a stable, giant enhancement of the perpendicular magnetic anisotropy, preserving the crystalline quality. This modulation is highly confined at the nanoscale in both the lateral and vertical directions, and its extension within the volume can be finely tuned with a continuous depth-control. By harnessing these three-dimensional anisotropy profiles, we demonstrate a large tuning of the spin-wave band structure, volume spatial localization, and non-reciprocity, realizing proof-of-principle 3D magnonic crystals. This straightforward, single-step, laser nanofabrication of three-dimensional magnetic systems based on crystalline YIG thin films opens the way to design novel functions in magnonic and magneto-optic devices.