This paper presents a bandwidth expansion method for dual-mass micro-electro-mechanical system (MEMS) gyroscopes based on the pole-zero temperature compensation method. When the sense loop operates under open conditions, the mechanical sensitivity of the gyroscope structure conflicts with the bandwidth and is governed by the frequency difference between the drive and sense modes (min { $\Delta\omega1, \Delta\omega2$ }), which is proven to change with temperature during the experiment. The pole-zero temperature compensation proportional controller (PZTCPC) is proposed to expand the bandwidth under different temperatures based on the pole-zero compensation method. The force rebalancing combs stimulation method (FRCSM) is used to achieve accurate gyroscope bandwidth characteristics. The mechanical bandwidth of the gyroscope is proven to be approximately 13 Hz when the sense mode loop is open, and the simulation results show that the PZTCPC method expands the bandwidth to greater than 91.7 Hz after the sense mode loop is closed. The FRCSM experiments indicate that gyroscope bandwidth is expanded to 95 Hz at -40°C 94 Hz at 20°C and 92 Hz at 60°C, while the bandwidths at -40°C, 20°C and 60°C are all 93 Hz with the turntable method. The experimental curves match the simulation curves well and verify the simulation results. The new limiting condition of the closed-loop bandwidth is the trough generated by conjugate zeros, formed by superposition of in-phase and anti-phase sense modes.

This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method. First, a ring vibration resonator with eight double U-beam structures was developed, and 24 capacitive electrodes were designed for drive and sense according to the advantageous characteristics of a thin-shell vibrating gyroscope. Then, based on the elastic mechanics and thin-shell theory, a mathematical stiffness model of the double U-beam was established. The maximum mode resonant frequency error calculated by the DUVRG stiffness model, finite element analysis (FEA) and experiments was 0.04%. DUVRG structures were manufactured by an efficient fabrication process using silicon-on-glass (SOG) and deep reactive ion etching (DRIE), and the FEA value and theoretical calculation had differences of 5.33% and 5.36% with the measured resonant frequency value, respectively. Finally, the static and dynamic performance of the fabricated DUVRG was tested, and the bias instability and angular random walk were less than 8.86 (°)/h and 0.776 (°)/√h, respectively.

In this article, a novel optical microelectromechanical systems (MEMS) accelerometer sensor based on a one-dimensional photonic crystals wavelength modulation system is proposed with a focus on optimizing the sensitivity of the high-frequency device. The proposed accelerometer consists of a sensitive optical system and a high-frequency mechanical structure, which have been studied by rigorous coupled wave analysis (RCWA) and finite element analysis (FEA). A very large bandwidth, excellent sensitivity to optical sensing and considerable resolution of the high-frequency device of the proposed sensor provide several attractive performance aspects. Through a rigorous theoretical argument, the following results are demonstrated: a photonic band gap (PBG) from 1.1 to 2.8 $\mu $ m, a bandwidth from 0 to 20 kHz, an optical system sensitivity of to 3.38, and an accelerometer sensitivity of 2.06 nm/g, with a measurement range of ± 217 g and a resolution of 4.850 mg. In view of these optimized performances, the proposed MEMS accelerometer can be used for all kinds of high frequency applications.

In our work, an optical MEMS accelerometer based on wavelength modulation is proposed, using a double nanoscale distributed Bragg reflector (nano-DBR) structure. In view of its specific structure, this proposed accelerometer consists of a mechanical structure and an optical system, which have been studied by finite element analysis (FEA) and rigorous coupled wave analysis (RCWA) respectively. By comparing the proposed accelerometer with other previously reported works, this accelerometer has high performance in terms of sensitivity, resolution and good linearity in the whole modulation range. The effective simulation results have demonstrated as follows: a resonance frequency of 562.85 Hz, a wavelength modulation range of 1.1 to 2.63 μm, a measurement range of ±1.56 g, a mechanical sensitivity of 781.64 nm/g, an optical system sensitivity of 1.23, an accelerometer sensitivity of 964.35 nm/g, a resolution of 1.037 μg, and low cross-sensitivity. According to such functional characters, the proposed accelerometer can be used for improvements in MEMS inertial navigation devices.

A proposal for a high-precision accelerometer based on a silicon optical microelectromechanical system (MEMS) is presented in this paper. The device operating principle is that a sensitive mechanical structure senses external vibrations and then the vibrations of the mechanical component cause regular changes in the target modes in the optical system. Through a judicious design of the optical system, we obtain a wide photonic band gap (PBG) (approximately 1.1-2.75 μm) as well as two target modes in the PBG for modulation. Comparison with previously reported works shows that the proposed double-mode accelerometer displays better performance with respect to properties such as sensitivity and resolution. Accurate simulation results obtained by finite element analysis and rigorous coupled wave analysis have obtained the following results: an optical sensitivity of 4.42, a natural frequency of 1032 Hz, a bandwidth from 0 to approximately 900 Hz, a mechanical sensitivity of 0.242 μm/g, an accelerometer sensitivity of 1.017 μm/g, a linear measurement range of 0.517 g and a resolution of 933.7 ng (= 1 pm). Due to these optimized performance characteristics, the proposed accelerometer can achieve high precision detection in microvibration applications such as seismic detection.

In recent years, nitrogen vacancy (NV) centers in diamond have become a promising solid-state magnetic sensor for applications due to their high sensitivity to magnetic field and excellent spatial resolution at room temperature. However, diamond magnetometer has complex and large optical system and microwave system, it is necessary to address the requirements of the measured environment for the small space and high sensitivity of the magnetometer in practical applications. In this paper, we propose an integrated magnetometer module with magnetic flux concentrators (MFCs) shaped like the wings of an airplane. The fiber coupler, diamond, microwave antenna, filters, photodetector and a weak signal processing circuit are integrated in the integrated module. MFCs are also integrated to collect flux from a larger area and concentrate it into the center of diamond magnetometer, which are used to improve the sensitivity of the diamond magnetometer. The volume of the integrated module is limited to 3.81 cm ³ and achieve the actual magnetic sensitivity of sub-0.34 nT/Hz ^1/2 . In the designed magnetometer module, the devices are assembled more easily and tightly, which provides a new degree of freedom for the production of diamond magnetometer.