This paper presents a bandwidth expansion method for dual-mass micro-electro-mechanical system (MEMS) gyroscopes based on the pole-zero temperature compensation method. When the sense loop operates under open conditions, the mechanical sensitivity of the gyroscope structure conflicts with the bandwidth and is governed by the frequency difference between the drive and sense modes (min { $\Delta\omega1, \Delta\omega2$ }), which is proven to change with temperature during the experiment. The pole-zero temperature compensation proportional controller (PZTCPC) is proposed to expand the bandwidth under different temperatures based on the pole-zero compensation method. The force rebalancing combs stimulation method (FRCSM) is used to achieve accurate gyroscope bandwidth characteristics. The mechanical bandwidth of the gyroscope is proven to be approximately 13 Hz when the sense mode loop is open, and the simulation results show that the PZTCPC method expands the bandwidth to greater than 91.7 Hz after the sense mode loop is closed. The FRCSM experiments indicate that gyroscope bandwidth is expanded to 95 Hz at -40°C 94 Hz at 20°C and 92 Hz at 60°C, while the bandwidths at -40°C, 20°C and 60°C are all 93 Hz with the turntable method. The experimental curves match the simulation curves well and verify the simulation results. The new limiting condition of the closed-loop bandwidth is the trough generated by conjugate zeros, formed by superposition of in-phase and anti-phase sense modes.

This paper proposed three methods to compensate the temperature energy influence drift of the MEMS vibration gyroscope, including radial basis function neural network (RBF NN), RBF NN based on genetic algorithm (GA), and RBF NN based on GA with Kalman filter (KF). Three‐axis MEMS vibration gyroscope (Gyro X, Gyro Y, and Gyro Z) output data are compensated and analyzed in this paper. The experimental results proved the correctness of these three methods, and MEMS vibration gyroscope temperature energy influence drift is compensated effectively. The results indicate that, after RBF NN‐GA‐KF method compensation, the bias instability of Gyros X, Y, and Z improves from 139°/h, 154°/h, and 178°/h to 2.9°/h, 3.9°/h, and 1.6°/h, respectively. And the angle random walk of Gyros X, Y, and Z was improved from 3.03°/h^1/2, 4.55°/h^1/2, and 5.89°/h^1/2 to 1.58°/h^1/2, 2.58°/h^1/2, and 0.71°/h^1/2, respectively, and the drift trend and noise characteristic are optimized obviously.

This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method. First, a ring vibration resonator with eight double U-beam structures was developed, and 24 capacitive electrodes were designed for drive and sense according to the advantageous characteristics of a thin-shell vibrating gyroscope. Then, based on the elastic mechanics and thin-shell theory, a mathematical stiffness model of the double U-beam was established. The maximum mode resonant frequency error calculated by the DUVRG stiffness model, finite element analysis (FEA) and experiments was 0.04%. DUVRG structures were manufactured by an efficient fabrication process using silicon-on-glass (SOG) and deep reactive ion etching (DRIE), and the FEA value and theoretical calculation had differences of 5.33% and 5.36% with the measured resonant frequency value, respectively. Finally, the static and dynamic performance of the fabricated DUVRG was tested, and the bias instability and angular random walk were less than 8.86 (°)/h and 0.776 (°)/√h, respectively.

The traditional processing model of the temperature error for a gyroscope is serial, meaning that de-noising and temperature drift compensation are implemented in a two-step procedure. Hence, the result of the latter depends on the performance of the former; in particular, negative de-noising produces a negative compensation result. To reduce this dependence, we propose a parallel processing algorithm of the temperature error based on variational mode decomposition (VMD) and an augmented nonlinear differentiator (AND). An application to a micro-electro-mechanical system gyroscope is described to demonstrate the effectiveness and applicability of the proposed algorithm. Its major advantages are (i) a combination of VMD, extreme learning machines, and AND is proposed, and an adaptive accelerometer factor determination method for AND is given based on the VMD, both of which improve the effectiveness of the de-noising process; (ii) temperature drift and noise in the temperature error can be extracted and processed synchronously, thereby reducing the dependency of drift compensation on the de-noising result and making the temperature error process more efficient.

This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce the long term bias drift. It is known that the coupling stiffness and demodulation error are important elements causing bias drift. The coupling stiffness in dual-mass structures is analyzed. The experiment proves that the left and right masses’ quadrature errors are different, and the quadrature correction system should be arranged independently. The process leading to quadrature error is proposed, and the Charge Injecting Correction (CIC), Quadrature Force Correction (QFC) and Coupling Stiffness Correction (CSC) methods are introduced. The correction objects of these three methods are the quadrature error signal, force and the coupling stiffness, respectively. The three methods are investigated through control theory analysis, model simulation and circuit experiments, and the results support the theoretical analysis. The bias stability results based on CIC, QFC and CSC are 48 °/h, 9.9 °/h and 3.7 °/h, respectively, and this value is 38 °/h before quadrature error correction. The CSC method is proved to be the better method for quadrature correction, and it improves the Angle Random Walking (ARW) value, increasing it from 0.66 °/√h to 0.21 °/√h. The CSC system general test results show that it works well across the full temperature range, and the bias stabilities of the six groups’ output data are 3.8 °/h, 3.6 °/h, 3.4 °/h, 3.1 °/h, 3.0 °/h and 4.2 °/h, respectively, which proves the system has excellent repeatability.