Enabled by the programmable, reversible and repeatable SMP film wrinkling on PDMS, smart adhesion with large tuning range is demonstrated.

Individualized long-term management of chronic pathologies remains an elusive goal despite recent progress in drug formulation and implantable devices. The lack of advanced systems for therapeutic administration that can be controlled and tailored based on patient needs precludes optimal management of pathologies, such as diabetes, hypertension, rheumatoid arthritis. Several triggered systems for drug delivery have been demonstrated. However, they mostly rely on continuous external stimuli, which hinder their application for long-term treatments. In this work, we investigated a silicon nanofluidic technology that incorporates a gate electrode and examined its ability to achieve reproducible control of drug release. Silicon carbide (SiC) was used to coat the membrane surface, including nanochannels, ensuring biocompatibility and chemical inertness for long-term stability for in vivo deployment. With the application of a small voltage (≤ 3 V DC) to the buried polysilicon electrode, we showed in vitro repeatable modulation of membrane permeability of two model analytes—methotrexate and quantum dots. Methotrexate is a first-line therapeutic approach for rheumatoid arthritis; quantum dots represent multi-functional nanoparticles with broad applicability from bio-labeling to targeted drug delivery. Importantly, SiC coating demonstrated optimal properties as a gate dielectric, which rendered our membrane relevant for multiple applications beyond drug delivery, such as lab on a chip and micro total analysis systems (µTAS).

Surfaces with tunable topological features enable important applications, such as optical devices, precision metrology, adhesion, and wetting. In this study, we demonstrate a facile method to fabricate and control the surface morphologies by combining thin film wrinkling and thermal expansion. This approach utilizes self-assembled surface wrinkling induced by shape recovery of shape memory polymers (SMPs) and localized thermal expansion caused by Joule heating. Recovering the prestrain in the SMP substrate induces global wrinkling of the thin film on the substrate. Joule heating in the SMP by a heating wire embedded in the substrate induces thermal expansion of the substrate in a localized area, which leads to the disappearance of the wrinkling pattern. This effect is reversed when heating is stopped, leading to reversible and repeatable tuning of the surface morphology in a controllable localized surface region. With metal coating, the SMP surface can be switched from specular to diffuse reflectance in response to external Joule heating. Finally, we demonstrate a smart micromirror device with its diffuse reflectance tunable between 13.5% and 81.9% in the visible light region. This approach provides a method to modulate surface diffusivity by controlling its surface morphologies, with potential applications in optical display and optical microelectromechanical systems devices.

Enabled by shape memory polymers (SMPs), time and temperature dependent wrinkling of single-crystal silicon thin films is demonstrated.

Manipulation of ions and molecules by external control at the nanoscale is highly relevant to biomedical applications. We report a biocompatible electrode-embedded nanofluidic channel membrane designed for electrofluidic applications such as ionic field-effect transistors for implantable drug-delivery systems. Our nanofluidic membrane includes a polysilicon electrode electrically isolated by amorphous silicon carbide (a-SiC). The nanochannel gating performance was experimentally investigated based on the current-voltage (I-V) characteristics, leakage current, and power consumption in potassium chloride (KCl) electrolyte. We observed significant modulation of ionic diffusive transport of both positively and negatively charged ions under physical confinement of nanochannels, with low power consumption. To study the physical mechanism associated with the gating performance, we performed electrochemical impedance spectroscopy. The results showed that the flat band voltage and density of states were significantly low. In light of its remarkable performance in terms of ionic modulation and low power consumption, this new biocompatible nanofluidic membrane could lead to a new class of silicon implantable nanofluidic systems for tunable drug delivery and personalized medicine.

Shape memory polymers (SMPs) can remember different shapes and can be recovered to their permanent shapes from temporary shapes with appropriate stimuli, such as heat, humidity, and electrical field. Using programmed thermal responsive SMPs as substrates, we demonstrate a self-assembly fabrication method for programmable surface wrinkling within a highly confined area that is accurately controllable. Different from global wrinkling reported in most of the literature, Joule heating through a heating wire embedded in the SMP substrate leads to temperature increase and thus recovery in a highly confined area of the SMP substrate, inducing localized wrinkling of the stiff thin film on SMPs. The patterns show good sinusoidal profiles, with the wrinkling wavelength and amplitude decreasing gradually with the distance from the heat source. The surface wrinkling area can be accurately tuned by controlling the heat input, such as power and duration. Based on this unique surface wrinkling phenomenon, we demonstrate a nonuniform reflective optical grating device, whose peak wrinkling wavelength and amplitude decrease gradually away from the heat source. This study offers a simple method to fabricate programmable localized wrinkling patterns, with potential applications in surface engineering, advanced manufacturing, optical gratings, and other demanding areas.