Jet electrochemical machining (Jet-ECM) is a significant prospective electrochemical machining process for the fabrication of micro-sized features. Traditionally and normally, the Jet-ECM process is carried out with its electrolytic jet being vertically impinged downstream against the workpiece. Therefore, other jet orientations, including a vertically upstream orientation and a horizontal orientation, have rarely been adopted. In this study, three jet orientations were applied to electrolytic jet machining, and the effect of jet orientations on machining characteristics was systemically investigated. Horizontal jet orientation is of great benefit in achieving accurate micro-sized features with excellent surface quality with either a static jet or a scanning jet for the Jet-ECM. On the other hand, the Jet-ECM with a horizontal jet orientation has a smaller material removal rate (MMR) than the ones with vertical jet orientations, which have almost the same MMR. It was found that an enhancement of machining localization and a reduction of MMR for horizontal jet electrochemical machining primarily results from an improvement of the mass-transfer field. The horizontal orientation of the jet is beneficial for the Jet-ECM processes to improve machining accuracy.

Jet electrochemical micromilling (JEMM) exhibits significant potential for high-efficiency and high-quality machining of titanium alloy microstructures. However, during the JEMM process, the machined surface of the workpiece inevitably experiences stray current attacks at low current levels. Due to the formation of a dense passive film on the surface of the titanium alloy under electrochemical action, stray corrosion occurs on the machined surface. Hence, the electrochemical dissolution behavior of titanium alloys at low current densities directly impacts both machining efficiency and quality. This study first analyzed the effects of electrolyte composition and current density on the transpassive potential, breakdown of the passive film, current efficiency, and the dissolved surface on Ti-6Al-4V. The transpassive potential and electrochemical impedance of Ti-6Al-4V were found to be lower in NaCl solution than in NaNO₃ solution. In addition, lower current densities enabled higher current efficiency and resulted in a more uniform and flat dissolution surface. Subsequent experiments used these two solutions for JEMM of complex-shaped microstructures on Ti-6Al-4V. The findings demonstrated that, compared to the NaNO₃ solution, the use of NaCl solution increases the material removal rate by approximately 30%, enhances the aspect ratio by about 26%, and reduces surface roughness by roughly 58%. This indicates that employing NaCl solution can lead to superior machining efficiency and quality.

Difficult-to-cut titanium matrix composites (TiB+TiC)/Ti6Al4V have extensive application prospects in the fields of biomedical and aerospace metal microcomponents due to their excellent mechanical properties. Jet electrochemical micromilling (JEMM) technology is an ideal method for machining microstructures that leverages the principle of electrochemical anodic dissolution. However, the matrix Ti6Al4V is susceptible to passivation during electrochemical milling, and the inclusion of high-strength TiB whiskers and TiC particles as reinforcing phases further increases the machining difficulty of (TiB+TiC)/Ti6Al4V. In this study, a novel approach using NaCl+NaNO3 mixed electrolyte for the JEMM of (TiB+TiC)/Ti6Al4V was adopted. Electrochemical behaviors were measured in NaCl and NaCl+NaNO3 electrolytes. In the mixed electrolyte, a higher transpassive potential was required to break down the passive film, which led to better corrosion resistance of (TiB+TiC)/Ti6Al4V, and the exposed reinforcing phases on the dissolved surface were significantly reduced. The results of the JEMM machining indicate that, compared to NaCl electrolyte, using mixed electrolyte effectively mitigates stray corrosion at the edges of micro-grooves and markedly improves the uniformity of both groove depth and width dimensions. Additionally, the surface quality was noticeably improved, with a reduction in Ra from 2.84 μm to 1.03 μm and in Rq from 3.41 μm to 1.40 μm.

High aspect ratio (HAR) ultrafine tapered holes (diameter ≤5 μm; AR ≥5) are the most important elements for some high-tech perforated metallic products, but they are very difficult to manufacture. Therefore, this paper proposes a nontraditional over-growth electroforming process. The formation mechanism of the HAR ultrafine tapered holes is investigated, and the factors controlling the geometric shape evolution are analyzed numerically. It was found that the geometric shape and dimensions of the holes are highly dependent on the diameter and thickness of the photoresist film patterns, but are hardly affected by the spacing between two neighboring patterns; the achievable diameter for a given hole depth becomes small with the increasing pattern diameter, but it becomes big with the increasing pattern thickness. These correlations can be well interpreted by the established two empirical equations that characterize the relationship between the minimum orifice of the tapered hole and the structural parameters of the photoresist film patterns previously formed on the substrate. Application of the fabricated 1500 tapered holes with 3-μm diameter and 17-AR as the nozzles of the medical precision nebulizer is also examined. The studies show that the over-growth electroforming process is highly applicable in fabricating the perforated metallic plate with HAR ultrafine tapered holes.

High-aspect-ratio micro- and mesoscale metallic components (HAR-MMMCs) can play some unique roles in quite a few application fields, but their cost-efficient fabrication is significantly difficult to accomplish. To address this issue, this study proposes a necked-entrance through-mask (NTM) periodically lifting electroforming technology with an impinging jet electrolyte supply. The effects of the size of the necked entrance of the through-mask and the jet speed of the electrolyte on electrodeposition behaviors, including the thickness distribution of the growing top surface, deposition defect formation, geometrical accuracy, and electrodeposition rate, are investigated numerically and experimentally. Ensuring an appropriate size of the necked entrance can effectively improve the uniformity of deposition thickness, while higher electrolyte flow velocities help enhance the density of the components under higher current densities, reducing the formation of deposition defects. It was shown that several precision HAR-MMMCs with an AR of 3.65 and a surface roughness (Ra) of down to 36 nm can be achieved simultaneously with a relatively high deposition rate of 3.6 μm/min and thickness variation as low as 1.4%. Due to the high current density and excellent mass transfer effects in the electroforming conditions, the successful electroforming of components with a Vickers microhardness of up to 520.5 HV was achieved. Mesoscale precision columns with circular and Y-shaped cross-sections were fabricated by using this modified through-mask movable electroforming process. The proposed NTM periodic lifting electroforming method is promisingly advantageous in fabricating precision HAR-MMMCs cost-efficiently.