Diana Mata

Ms. Diana Mata

Universitat Politècnica de Catalunya
orcid

Research Focus & Metrics

Academic Career Length

7Years (2020-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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23 October 2020 in Sensors
Verified
Journal Article
Open access
PDF file
DMDiana Mata
Diana Mata
DFDaniel Fernández
Daniel Fernández
SBSaoni Banerji
Saoni Banerji
JMJordi Madrenas
Jordi Madrenas
This work presents the design and characterization of a resonant CMOS-MEMS pressure sensor manufactured in a standard 180 nm CMOS industry-compatible technology. The device consists of aluminum square plates attached together by means of tungsten vias integrated into the back end of line (BEOL) of the CMOS process. Three prototypes were designed and the structural characteristics were varied, particularly mass and thickness, which are directly related to the resonance frequency, quality factor, and pressure; while the same geometry at the frontal level, as well as the air gap, were maintained to allow structural comparative analysis of the structures. The devices were released through an isotropic wet etching step performed in-house after the CMOS die manufacturing, and characterized in terms of Q-factor vs. pressure, resonant frequency, and drift vs. temperature and biasing voltage.

15 September 2023
Verified
Book Chapter
Closed access
PDF file
SRS. E. Ramírez-Domínguez
S. E. Ramírez-Domínguez
NON. J. Montes de Oca-Mora
N. J. Montes de Oca-Mora
RGRosa Maria Woo García
Rosa Maria Woo García
SVS. E. Vázquez-Valdes
S. E. Vázquez-Valdes
DMDiana Mata
Diana Mata
FLFrancisco Lopez
Francisco Lopez