We report a systematical study on the liquid assisted femtosecond laser machining of quartz plate in water and under different etching solutions. The ablation features in liquid showed a better structuring quality and improved resolution with 1/3~1/2 smaller features as compared with those made in air. It has been demonstrated that laser induced periodic structures are present to a lesser extent when laser processed in water solutions. The redistribution of oxygen revealed a strong surface modification, which is related to the etching selectivity of laser irradiated regions. Laser ablation in KOH and HF solution showed very different morphology, which relates to the evolution of laser induced plasma on the formation of micro/nano-features in liquid. This work extends laser precision fabrication of hard materials. The mechanism of strong absorption in the regions with permittivity (epsilon) near zero is discussed.

Birefringence of $3\times {10}^{-3}$ is demonstrated inside cross-sectional regions of 100 $\mathsf{\mu }$ m, inscribed by axially stretched Bessel-beam-like fs-laser pulses along the c-axis inside sapphire. A high birefringence and retardance of $\lambda /4$ at mid-visible spectral range (green) can be achieved using stretched beams with axial extension of 30–40 $\mathsf{\mu }$ m. Chosen conditions of laser-writing ensure that there are no formations of self-organized nano-gratings. This method can be adopted for creation of polarization optical elements and fabrication of spatially varying birefringent patterns for optical vortex generation.

The nanoresolution of geometric phase elements for visible wavelengths calls for a flexible technology with high throughout and free from vacuum. In this article, we propose a high-efficiency and simple manufacturing method for the fabrication of geometric phase elements with femtosecond–laser direct writing (FsLDW) and thermal annealing by combining the advantages of high-efficiency processing and thermal smoothing effect. By using a femtosecond laser at a wavelength of 343 nm and a circular polarization, free-form nanogratings with a period of 300 nm and 170-nm-wide grooves were obtained in 50 s by laser direct ablation at a speed of 5 mm/s in a non-vacuum environment. After fine-tuning through a hot-annealing process, the surface morphology of the geometric phase element was clearly improved. With this technology, we fabricated blazed gratings, metasurface lens, vortex Q-plates and “M” holograms and confirmed the design performance by analyzing their phases at the wavelength of 808 nm. The efficiency and capabilities of our proposed method can pave the possible way to fabricate geometric phase elements with essentially low loss, high-temperature resistance, high phase gradients and novel polarization functionality for potentially wide applications.