In this study, a preparation method for the high-temperature pressure sensor based on the piezoresistive effect of p-type SiC is presented. The varistor with a positive trapezoidal shape was designed and etched innovatively to improve the contact stability between the metal and SiC varistor. Additionally, the excellent ohmic contact was formed by annealing at 950 °C between Ni/Al/Ni/Au and p-type SiC with a doping concentration of 10¹⁸cm⁻³. The aging sensor was tested for varistors in the air of 25 °C–600 °C. The resistance value of the varistors initially decreased and then increased with the increase of temperature and reached the minimum at ~450 °C. It could be calculated that the varistors at ~100 °C exhibited the maximum temperature coefficient of resistance (TCR) of ~−0.35%/°C. The above results indicated that the sensor had a stable electrical connection in the air environment of ≤600 °C. Finally, the encapsulated sensor was subjected to pressure/depressure tests at room temperature. The test results revealed that the sensor output sensitivity was approximately 1.09 mV/V/bar, which is better than other SiC pressure sensors. This study has a great significance for the test of mechanical parameters under the extreme environment of 600 °C.

This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent isotropic etching-caused damage on the device. The responsivity of the detector achieved 1151.14 V/W, and the measured response time was 14.46 ms. The detector had the potential to work as a high-precision temperature sensor and as a vacuum sensor.

The ammonia sensing properties of single-layer graphene synthesized by chemical vapor deposition (CVD) were studied. The Au interdigitated electrode (IDE) was prepared by microelectromechanical systems (MEMS) technology, and then, the single-layer graphene was transferred to the IDE by wet transfer technology. Raman spectroscopy was used to monitor the quality of graphene films transferred to SiO₂/Si substrates. Moreover, the theory of graphene’s adsorption of gases is explained. The results show that gas sensing characteristics such as response/recovery time and response are related to the target gas, gas concentration, test temperature, and so on. In the stability test, the difference between the maximum resistance and the minimum resistance of the device is 1 ohm without ammonia, the change is less than 1% of its initial resistance, and the repeatability is up to 98.58%. Therefore, the sensor prepared with high quality single-layer graphene has good repeatability and stability for ammonia detection.

In this paper, we design and optimize a low-cost, closed-film structure of a microelectromechanical systems (MEMS) thermopile infrared detector. By optimizing the circular arrangement of thermocouple strips and the thermal isolation design of the cold end to pursue a higher temperature difference, in addition to eliminating the absorption region, silicon nitride is deposited on the whole device surface as a passivated absorption layer. This reduces the cost while maintaining the voltage response and is suitable for mass production. The optimized detector had a 22.6% improvement in the response rate to 34.2 V/W, a detection rate of 1.02 × 10⁸ cm·Hz^1/2/W, and a response time of 26.9 ms. The design optimization of this detector provides a reference for further development of IR detectors.

Aimed at the problems of a large equipment size, long time and high price of environmental VOC gas detection, the FAIMS-VOC gas sensor was designed and prepared according to the principle that the ionization energy of the common VOC gas is less than 10.6 eV. The sensor is small in size, fast in detection, low in power consumption, and can work continuously. The sensor was fabricated through the MEMS process, a specific process which included photolithography, etching, anodic bonding, etc. The sensor is 5160 μm long, 5300 μm wide and 800 μm high. We built a test system to detect two typical VOC gases: isobutylene and acetone. The results show that in the detection of isobutylene gas and acetone gas, the sensor voltage value changes with the change of gas concentration. The linearity of testing isobutylene is 0.961, and the linearity of testing acetone is 0.987. When the isobutylene gas concentration is 50 ppm, the response time is 8 s and the recovery time is 6 s; when the acetone gas concentration is 50 ppm, the response time is 9 s and the recovery time is 10 s. In addition, the sensor demonstrates good repeatability and stability, which are conducive to the detection of VOCs in the environment.

In this paper, to address the problems of large blood draws, long testing times, and the inability to achieve dynamic detection of invasive testing for diabetes, stemming from the principle that type 1 diabetic patients exhale significantly higher levels of acetone than normal people, a FAIMS-MEMS gas sensor was designed to detect acetone, which utilizes the characteristics of high sensitivity, fast response, and non-invasive operation. It is prepared by MEMS processes, such as photolithography, etching, and sputtering, its specific dimensions are 4000 μm in length, 3000 μm in width and 800 μm in height and the related test system was built to detect acetone gas. The test results show that when acetone below 0.8 ppm is introduced, the voltage value detected by the sensor basically does not change, while when acetone gas exceeds 1.8 ppm, the voltage value detected by the sensor increases significantly. The detection accuracy of the sensor prepared by this method is about 0.02 ppm/mV, and the voltage change can reach 1 V with a response time of 3 s and a recovery time of 4 s when tested under 20 ppm acetone environment; this has good repeatability and stability, and has great prospects in the field of non-invasive detection of type 1 diabetes.