Traditional humidity sensors for respiration monitoring applications have faced technical challenges, including low sensitivity, long recovery times, high parasitic capacitance and uncalibrated temperature drift. To overcome these problems, we present a triple-layer humidity sensor that comprises a nanoforest-based sensing capacitor, a thermistor, a microheater and a reference capacitor. When compared with traditional polyimide-based humidity sensors, this novel device has a sensitivity that is improved significantly by 8 times within a relative humidity range of 40–90%. Additionally, the integration of the microheater into the sensor can help to reduce its recovery time to 5 s. The use of the reference capacitor helps to eliminate parasitic capacitance, and the thermistor helps the sensor obtain a higher accuracy. These unique design aspects cause the sensor to have an excellent humidity sensing performance in respiration monitoring applications. Furthermore, through the adoption of machine learning algorithms, the sensor can distinguish different respiration states with an accuracy of 94%. Therefore, this humidity sensor design is expected to be used widely in both consumer electronics and intelligent medical instrument applications.

Flexible humidity sensors, as pivotal sensing components in the Internet of Things and intelligent era, have achieved significant progress in material innovation, fabrication engineering, and application diversification in recent years. This review systematically presents the current research status of flexible humidity sensors, focusing on the influence of novel humidity-sensitive materials(including polymers, metal oxides, carbon-based materials, and two-dimensional materials) on key performance metrics such as sensitivity, response time, and stability. The optimization effects of fabrication technologies such as screen printing, spraying, and deposition on device performance are also analyzed. Furthermore, the innovative applications of flexible humidity sensors in fields including healthcare, smart agriculture, smart homes, and human-machine interaction are elaborated in detail. These applications highlight the sensors’ adaptability to diverse environmental requirements and their potential to enable intelligent monitoring and interactive systems. Finally, future technological directions for flexible humidity sensors are proposed from the perspectives of material system innovation, improvement of multi-parameter collaborative sensing performance, and optimization of adaptability to complex environments. The proposed development directions are targeted at achieving higher precision, multifunctionality, and self-powered operation, providing insights and guidance for the research and development of next-generation flexible intelligent sensing devices. By bridging material science, manufacturing engineering, and application engineering, this comprehensive review provides a forward-looking perspective on advancing flexible humidity sensing technologies for emerging intelligent systems.

Circulating tumor cells (CTCs), a type of cancer cell that spreads from primary tumors into human peripheral blood and are considered as a new biomarker of cancer liquid biopsy. It provides the direction for understanding the biology of cancer metastasis and progression. Isolation and analysis of CTCs offer the possibility for early cancer detection and dynamic prognosis monitoring. The extremely low quantity and high heterogeneity of CTCs are the major challenges for the application of CTCs in liquid biopsy. There have been significant research endeavors to develop efficient and reliable approaches to CTC isolation and analysis in the past few decades. With the advancement of microfabrication and nanomaterials, a variety of approaches have now emerged for CTC isolation and analysis on microfluidic platforms combined with nanotechnology. These new approaches show advantages in terms of cell capture efficiency, purity, detection sensitivity and specificity. This review focuses on recent progress in the field of nanotechnology-assisted microfluidics for CTC isolation and detection. Firstly, CTC isolation approaches using nanomaterial-based microfluidic devices are summarized and discussed. The different strategies for CTC release from the devices are specifically outlined. In addition, existing nanotechnology-assisted methods for CTC downstream analysis are summarized. Some perspectives are discussed on the challenges of current methods for CTC studies and promising research directions.

This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent isotropic etching-caused damage on the device. The responsivity of the detector achieved 1151.14 V/W, and the measured response time was 14.46 ms. The detector had the potential to work as a high-precision temperature sensor and as a vacuum sensor.