Liang-Chia Chen

Prof. Liang-Chia Chen

Distinguished Professor, National Taiwan University
orcid

Research Focus & Metrics

Academic Career Length

73Years (1954-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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1 April 2005 in Journal of Crystal Growth
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Journal Article
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CLChih-Hung Lo
Chih-Hung Lo
TTTsing-Tshih Tsung
Tsing-Tshih Tsung
Liang-Chia ChenLiang-Chia Chen
Liang-Chia Chen

1 June 2005 in Journal of Nanoparticle Research
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Journal Article
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CLChih-Hung Lo
Chih-Hung Lo
TTTsing-Tshih Tsung
Tsing-Tshih Tsung
Liang-Chia ChenLiang-Chia Chen
Liang-Chia Chen
CSChun-His Su
Chun-His Su
HLHong-Ming Lin
Hong-Ming Lin

16 February 2021 in Measurement Science and Technology
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Journal Article
Closed access
Yuki ShimizuYuki Shimizu
Yuki Shimizu
Liang-Chia ChenLiang-Chia Chen
Liang-Chia Chen
DKDaewook Kim
Daewook Kim
Xiuguo ChenXiuguo Chen
Xiuguo Chen
XLXinghui Li
Xinghui Li
HMHiraku Matsukuma
Hiraku Matsukuma
Optical metrology is one of the key technologies in today’s manufacturing industry. In this article, we provide an insight into optical measurement technologies for precision positioning and quality assessment in today’s manufacturing industry. First, some optical measurement technologies for precision positioning are explained, mainly focusing on those with a multi-axis positioning system composed of linear slides, often employed in machine tools or measuring instruments. Some optical measurement technologies for the quality assessment of products are then reviewed, focusing on technologies for form measurement of products with a large metric structure, from a telescope mirror to a nanometric structure such as a semiconductor electrode. Furthermore, we also review the state-of-the-art optical technique that has attracted attention in recent years, optical coherence tomography for the non-destructive inspection of the internal structures of a fabricated component, as well as super-resolution techniques for improving the lateral resolution of optical imaging beyond the diffraction limit of light. This review article provides insights into current and future technologies for optical measurement in the manufacturing industry, which are expected to become even more important to meet the industry’s continuing requirements for high-precision and high-efficiency machining.

23 March 2005 in Measurement Science and Technology
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Journal Article
Closed access
Liang-Chia ChenLiang-Chia Chen
Liang-Chia Chen
CHChung-Chih Huang
Chung-Chih Huang


5 December 2016 in Optics Letters
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Journal Article
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PDF file
Liang-Chia ChenLiang-Chia Chen
Liang-Chia Chen
DNDuc Trung Nguyen
Duc Trung Nguyen
YCYi-Wei Chang
Yi-Wei Chang
A broadband differential confocal method that exploits novel double-slit chromatic confocal microscopy was developed for one-shot microscopic 3D surface measurement. In situ automated optical inspection to generate microscopic surface profiles has become extremely important for ensuring strict geometric compliance in precision manufacturing. An innovative optical configuration was developed to generate a pair of orthogonally polarized incident light beams, and a pair of the conjugate light beams was detected using two slits of different widths at the corresponding conjugate imaging locations of the incident beams. A sub-micrometer depth measuring repeatability can be achieved for the one-shot reconstruction of 3D surface profiles.