Optical metrology is one of the key technologies in today’s manufacturing industry. In this article, we provide an insight into optical measurement technologies for precision positioning and quality assessment in today’s manufacturing industry. First, some optical measurement technologies for precision positioning are explained, mainly focusing on those with a multi-axis positioning system composed of linear slides, often employed in machine tools or measuring instruments. Some optical measurement technologies for the quality assessment of products are then reviewed, focusing on technologies for form measurement of products with a large metric structure, from a telescope mirror to a nanometric structure such as a semiconductor electrode. Furthermore, we also review the state-of-the-art optical technique that has attracted attention in recent years, optical coherence tomography for the non-destructive inspection of the internal structures of a fabricated component, as well as super-resolution techniques for improving the lateral resolution of optical imaging beyond the diffraction limit of light. This review article provides insights into current and future technologies for optical measurement in the manufacturing industry, which are expected to become even more important to meet the industry’s continuing requirements for high-precision and high-efficiency machining.

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Optical surfaces can be accurately figured by computer controlled optical surfacing (CCOS) that uses well characterized sub-diameter polishing tools driven by numerically controlled (NC) machines. The motion of the polishing tool is optimized to vary the dwell time of the polisher on the workpiece according to the desired removal and the calibrated tool influence function (TIF). Operating CCOS with small and very well characterized TIF achieves excellent performance, but it takes a long time. This overall polishing time can be reduced by performing sequential polishing runs that start with large tools and finish with smaller tools. In this paper we present a variation of this technique that uses a set of different size TIFs, but the optimization is performed globally – i.e. simultaneously optimizing the dwell times and tool shapes for the entire set of polishing runs. So the actual polishing runs will be sequential, but the optimization is comprehensive. As the optimization is modified from the classical method to the comprehensive non-sequential algorithm, the performance improvement is significant. For representative polishing runs we show figuring efficiency improvement from ~88% to ~98% in terms of residual RMS (root-mean-square) surface error and from ~47% to ~89% in terms of residual RMS slope error.

Computer controlled polishing requires accurate knowledge of the tool influence function (TIF) for the polishing tool (i.e. lap). While a linear Preston’s model for material removal allows the TIF to be determined for most cases, nonlinear removal behavior as the tool runs over the edge of the part introduces a difficulty in modeling the edge TIF. We provide a new parametric model that fits 5 parameters to measured data to accurately predict the edge TIF for cases of a polishing tool that is either spinning or orbiting over the edge of the workpiece.

This review paper addresses topics of fabrication, testing, alignment, and as-built performance of reflective space optics for the next generation of telescopes across the x-ray to far-infrared spectrum. The technology presented in the manuscript represents the most promising methods to enable a next level of astronomical observation capabilities for space-based telescopes as motivated by the science community. While the technology to produce the proposed telescopes does not exist in its final form, the optics industry is making steady and impressive progress toward these goals across all disciplines. We hope that through sharing these developments in context of the science objectives, further connections and improvements are enabled to push the envelope of the technology.

Significant optical engineering advances at the University of Arizona are being made for design, fabrication, and construction of next generation astronomical telescopes. This summary review paper focuses on the technological advances in three key areas. First is the optical fabrication technique used for constructing next-generation telescope mirrors. Advances in ground-based telescope control and instrumentation comprise the second area of development. This includes active alignment of the laser truss-based Large Binocular Telescope (LBT) prime focus camera, the new MOBIUS modular cross-dispersion spectroscopy unit used at the prime focal plane of the LBT, and topological pupil segment optimization. Lastly, future space telescope concepts and enabling technologies are discussed. Among these, the Nautilus space observatory requires challenging alignment of segmented multi-order diffractive elements. The OASIS terahertz space telescope presents unique challenges for characterizing the inflatable primary mirror, and the Hyperion space telescope pushes the limits of high spectral resolution, far-UV spectroscopy. The Coronagraphic Debris and Exoplanet Exploring Pioneer (CDEEP) is a Small Satellite (SmallSat) mission concept for high-contrast imaging of circumstellar disks and exoplanets using vector vortex coronagraph. These advances in optical engineering technologies will help mankind to probe, explore, and understand the scientific beauty of our universe.