Electronic speckle pattern interferometry (ESPI) is a wholefield non-contact optical metrology technique for displacement measurement, based on the optical physics of surface-generated laser speckle. Since its inception during the early 1970s ESPI has gradually evolved into different optical designs and has been applied to a range of engineering and non-engineering applications. Development of ESPI has continued during the 1990s with the introduction of new laser and optical technology into the interferometers, allowing further optimization and extending the potential applicability of the technique. This review considers the most notable developments of interferometer design and application that have occurred and been widely published during the 1990s, and examines the current and near-future direction of research into the technique.

Localized changes in the density of water induced by the presence of an acoustic field cause perturbations in the localized refractive index. This relationship has given rise to a number of nonperturbing optical metrology techniques for recording measurement parameters from underwater acoustic fields. A method that has been recently developed involves the use of a Laser Doppler Vibrometer (LDV) targeted at a fixed, nonvibrating, plate through an underwater acoustic field. Measurements of the rate of change of optical pathlength along a line section enable the identification of the temporal and frequency characteristics of the acoustic wave front. This approach has been extended through the use of a scanning LDV, which facilitates the measurement of a range of spatially distributed parameters. A mathematical model is presented that relates the distribution of pressure amplitude and phase in a planar wave front with the rate of change of optical pathlength measured by the LDV along a specifically orientated laser line section. Measurements of a 1 MHz acoustic tone burst generated by a focused transducer are described and the results presented. Graphical depictions of the acoustic power and phase distribution recorded by the LDV are shown, together with images representing time history during the acoustic wave propagation.

Non-destructive measurements of high aspect ratio microscale features, especially those with internal geometries such as micro-holes, remain a challenging metrology problem that is increasing in difficulty due to the increasing requirement for more complexity and higher tolerances in such structures. Additionally, there is a growing use of functional surface texturing for improving characteristics such as heat transfer and wettability. As a result, measurement techniques capable of providing dimensional form and surface finish for these features are of intense interest. This review explores the state-of-the-art inspection methodologies compatible with high-aspect-ratio structures and their suitability for extracting three-dimensional surface data based on identified high-aspect ratio structure types. Here, the abilities, limitations, challenges, and future requirements for the practical implementation and acceptance of these measurement techniques are presented.