The advancement of polymer moulding tools is increasingly focused on imparting not only form but also surface texture for functionality to the surfaces of parts that are created. Furthermore, the increasing demand for inexpensive and higher quality micro-components means that tools for replication processes must take advantage of advanced manufacturing techniques. Tools created by processes such as micro-investment casting, as in this case, may often suffer from excessive surface roughness, malformed edges and general deformation. This results in higher de-moulding forces and a reduction in fidelity of moulded parts to design intent. In this study, large-area electron beam irradiation (EB) is shown to be an effective technique for improving these metrics. For the first time, large population, high aspect ratio micro-features are subject to this process and the mechanisms of smoothing and key enhancement phenomena are demonstrated. The possibility of including EB irradiation in an integrated process chain for arriving at net shape is also discussed.\ud \ud Surfaces of protruding features are shown to have surface roughness reduced significantly from 126 to 22 nm Ra value, with bottom substrate also similarly improving from 150 to 27 nm Ra. Bottoms of recessed features are also observed to have much improved surface finishes. ‘Doming’ of tops of column features is also demonstrated, further enhancing form. These features would be far too fragile to be polished by any other mechanical method

This paper presents a MEMS Resonant Pressure Transducers (RPT) that is produced using a flexible fabrication route to allow pressure ranges from 1bar to 700bar in fully oil isolated hermetic packages without compromising sensor performance. The fabrication method makes use of silicon fusion bonding (SFB) and deep reactive ion etching (DRIE) to build up a three-layer die, with the middle layer consisting of a strain sensitive resonator. The key aspects of the fabrication process and sensor design that make this possible are presented, along with data showing long-term stability of better than 100ppm drift per year.

Non-destructive measurements of high aspect ratio microscale features, especially those with internal geometries such as micro-holes, remain a challenging metrology problem that is increasing in difficulty due to the increasing requirement for more complexity and higher tolerances in such structures. Additionally, there is a growing use of functional surface texturing for improving characteristics such as heat transfer and wettability. As a result, measurement techniques capable of providing dimensional form and surface finish for these features are of intense interest. This review explores the state-of-the-art inspection methodologies compatible with high-aspect-ratio structures and their suitability for extracting three-dimensional surface data based on identified high-aspect ratio structure types. Here, the abilities, limitations, challenges, and future requirements for the practical implementation and acceptance of these measurement techniques are presented.

This is an Accepted Manuscript of an article published by Taylor & Francis on 14th Aug 2014, available online: http://dx.doi.org/10.1080/10426914.2014.930949.© 2014 Taylor & Francis Group, LLC. The addition of hard abrasives to the jet in waterjet machining can improve machining rate, however, embedding of particles in machined surfaces is a limitation, which results in reduced fatigue life, and limits the application of well adhered subsequent coatings to the surface. In this study, softer soluble abrasives were investigated as a potential solution. Soluble abrasives yielded a higher material removal rate compared to plain waterjet, although were not as effective as traditional hard abrasives. Soluble abrasives reduced grit embedment on all four workpiece materials. A post-machining surface cleaning operation demonstrated that any remaining soluble abrasive could be removed