The 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3(0.7PMN-0.3PT) nanorods were obtained via hydrothermal method with high yield (over 78%). Then, new piezoelectric nanocomposites based on (1−x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT) nanorods were fabricated by dispersing the 0.7PMN-0.3PT nanorods into piezoelectric poly(vinylidene fluoride) (PVDF) polymer. The mechanical behaviors of the nanocomposites were investigated. The voltage and current generation of PMN-PT/PVDF nanocomposites were also measured. The results showed that the tensile strength, yield strength, and Young’s modulus of nanocomposites were enhanced as compared to that of the pure PVDF. The largest Young’s modulus of 1.71 GPa was found in the samples with 20 wt % nanorod content. The maximum output voltage of 10.3 V and output current of 46 nA were obtained in the samples with 20 wt % nanorod content, which was able to provide a 13-fold larger output voltage and a 4.5-fold larger output current than that of pure PVDF piezoelectric polymer. The current density of PMN-PT/PVDF nanocomposites is 20 nA/cm2. The PMN-PT/PVDF nanocomposites exhibited great potential for flexible self-powered sensing applications.
We report in this paper on the study of surface acoustic wave (SAW) resonators based on an AlN/titanium alloy (TC4) structure. The AlN/TC4 structure with different thicknesses of AlN films was simulated, and the acoustic propagating modes were discussed. Based on the simulation results, interdigital transducers with a periodic length of 24 μm were patterned by lift-off photolithography techniques on the AlN films/TC4 structure, while the AlN film thickness was in the range 1.5–3.5 μm. The device performances in terms of quality factor (Q-factor) and electromechanical coupling coefficient (k2) were determined from the measure S11 parameters. The Q-factor and k2 were strongly dependent not only on the normalized AlN film thickness but also on the full-width at half-maximum (FWHM) of AlN (002) peak. The dispersion curve of the SAW phase velocity was analyzed, and the experimental results showed a good agreement with simulations. The temperature behaviors of the devices were also presented and discussed. The prepared SAW resonators based on AlN/TC4 structure have potential applications in integrated micromechanical sensing systems.