A new type of vertical nanowire (NW) /nanosheet (NS) field-effect transistors (FETs), termed vertical sandwich gate-all-around (GAA) FETs (VSAFETs), is presented in this work. Moreover, an integration flow that is compatible with processes used in the mainstream industry is proposed for the VSAFETs. Si/SiGe epitaxy, isotropic quasi-atomic-layer etching (qALE), and gate replacement were used to fabricate pVSAFETs for the first time. Vertical GAA FETs with self-aligned high-k metal gates and a small effective-gate-length variation were obtained. Isotropic qALE, including Si-selective etching of SiGe, was developed to control the diameter/thickness of the NW/NS channels. NWs with a diameter of 10 nm and NSs with a thickness of 20 nm were successfully fabricated, and good device characteristics were obtained. Finally, the device performance was investigated and is discussed in this work.

This article presents a comprehensive assessment on the 6T static random access memory (SRAM) cell with 7-nm FinFET technology by implementing quantum physics-based device-circuit cooptimization. Seven key device design parameters and their multiple impacts on a 6T SRAM cell are systematically evaluated, focusing on materials band engineering, device design, circuit parameters tradeoff, and variation control. The area of SRAM cell under the same Fin quantization scheme remains constant in all evaluations. To the best of our knowledge, the most comprehensive discussion about circuit optimization from multiple device design parameters perspective is presented. Based on our cooptimization scheme, a SRAM cell is effectively designed. For a low-power and robust SRAM cell design, we achieve 56.7% reduction in leakage, 7.9% improvement in hold noise margin (HNM), 8.6% improvement in read noise margin (RNM), and 10.8% improvement in write margin (WM) at the expense of 19.3% increase in delay under design space of gate length (Lg) and spacer thickness (TSPC). For a high-speed SRAM cell design, we recommend focusing on the optimization of architecture and peripheral circuits. This framework not only has the advantages of easy implementation, technology-friendly, and high accuracy, but also suitable for path-finding researches on 5-nm node and beyond.

We presented and demonstrated a new type of vertical nanowire (NW) and nanosheet (NS) field-effect transistors (FETs), named vertical sandwich gate-all-around FETs or VSAFETs, which were formed with the process compatible in the main stream industry. The VSAFETs with self-aligned high- ${k}$ metal gates (HKMGs) were fabricated with epitaxy of Si/SiGe/Si sandwich structure, an isotropic quasi-atomic-layer-etch (qALE) process, and gate replacement process. The gate-length of VSAFETs is mainly determined by the thickness of SiGe film grown by epitaxy. The NW diameter and NS thickness could be obtained by the isotropic qALE method, which can be used to the Si-selective etching of SiGe. As a result, p-type NS and NW VSAFETs with good device characteristics were fabricated. Device performance and the influence of silicide, Ge fraction, Si cap, and high thermal process were investigated; threshold voltage tuning and reliability were also discussed.

A novel vertical C-shaped-channel nanosheet field-effect-transistor (VCNFET) featured with precise control of channel-thickness and gate-length, and a unique integration flow of Dual Side Process (DSP) are proposed in this work. The VCNFETs were fabricated by high quality Si/SiGe epitaxy, atomic layer etching with nanometer-scale process control and self-aligned high-k metal gate (HKMG). The integration flow is compatible with mainstream CMOS technology. Thanks to the precise control of channel thickness and doping profiles, perfect SS of 61 mV/dec, small DIBL of 8 mV/V, and remarkably large $\text{I}_{\text {on}}/\text {I}_{\text {off}}$ ratio of ${6.28}\times {10}^{{9}}$ were achieved. The device performance and it’s optimization were also investigated with the reduction of the external resistance and numerical simulations.

Ferroelectric vertical gate-all-around field-effect-transistor (Fe-VGAAFET) suits a memory cell with a 5 nm technology node and beyond since it is less constrained by gate length, thereby providing sufficient space for the ferroelectric film compared with ferroelectric FinFET (Fe-FinFET) and ferroelectric lateral gate-all-around field-effect-transistors (Fe-LGAAFET). Also, Fe-VGAAFET achieves multilayer vertical stacking, which further increases the integrated density of devices. Here, we develop ferroelectric vertical sandwich gate-all-around field-effect-transistors (Fe-VSAFETs) with large memory windows (the maximum 2.3 V), high program/erase speeds (100 ns), and excellent retention properties using a self-aligned high- $\kappa $ metal gate process. Furthermore, vertical nanosheet devices with two channel thicknesses of approximately 16 and 42 nm and nanowire devices with a channel diameter of 30 nm were successfully fabricated, and excellent device characteristics were obtained.

A novel comb-like-channel field-effect transistor (CombFET), which is the combination of the fin field-effect transistor (FinFET) and nanosheet FET (NshFET) geometries in the channel region, is proposed and evaluated numerically for the first time. Our simulations show that: 1) with the same footprint, CombFET ON-current is 43% higher than FinFET and 53% higher than gate-all-around FET (GAAFET) due to its larger effective channel width and relieved channel quantum confinement and 2) CombFETs have great advantages in performance optimization through surface orientation over FinFETs and NshFETs. Thanks to the unique structural design, CombFET can also be used to improve or eliminate the bending or adhesion effects between nanosheets/comb teeth.