The effect of the sensitive area of the two-port resonator configuration on the mass sensitivity of a Rayleigh surface acoustic wave (R-SAW) sensor was investigated theoretically, and verified in experiments. A theoretical model utilizing a 3-dimensional finite element method (FEM) approach was established to extract the coupling-of-modes (COM) parameters in the absence and presence of mass loading covering the electrode structures. The COM model was used to simulate the frequency response of an R-SAW resonator by a P-matrix cascading technique. Cascading the P-matrixes of unloaded areas with mass loaded areas, the sensitivity for different sensitive areas was obtained by analyzing the frequency shift. The performance of the sensitivity analysis was confirmed by the measured responses from the silicon dioxide (SiO₂) deposited on different sensitive areas of R-SAW resonators. It is shown that the mass sensitivity varies strongly for different sensitive areas, and the optimal sensitive area lies towards the center of the device.

Design, fabrication and experiments of a miniature particulate matter (PM) 2.5 sensor based on the surface acoustic wave (SAW) technology were proposed. The sensor contains a virtual impactor (VI) for particle separation, a thermophoretic precipitator (TP) for PM_2.5 capture and a SAW sensor chip for PM_2.5 mass detection. The separation performance of the VI was evaluated by using the finite element method (FEM) model and the PM_2.5 deposition characteristic in the TP was obtained by analyzing the thermophoretic theory. Employing the coupling-of-modes (COM) model, a low loss and high-quality SAW resonator was designed. By virtue of the micro electro mechanical system (MEMS) technology and semiconductor technology, the SAW based PM_2.5 sensor detecting probe was fabricated. Then, combining a dual-port SAW oscillator and an air sampler, the experimental platform was set up. Exposing the PM_2.5 sensor to the polystyrene latex (PSL) particles in a chamber, the sensor performance was evaluated. The results show that by detecting the PSL particles with a certain diameter of 2 μm, the response of the SAW based PM_2.5 sensor is linear, and in accordance with the response of the light scattering based PM_2.5 monitor. The developed SAW based PM_2.5 sensor has great potential for the application of airborne particle detection.