A new room temperature supra-molecular cryptophane A (CrypA)-coated surface acoustic wave (SAW) sensor for sensing methane gas is presented. The sensor is composed of differential resonator-oscillators, a supra-molecular CrypA coated along the acoustic propagation path, and a frequency signal acquisition module (FSAM). A two-port SAW resonator configuration with low insertion loss, single resonation mode, and high quality factor was designed on a temperature-compensated ST-X quartz substrate, and as the feedback of the differntial oscillators. Prior to development, the coupling of modes (COM) simulation was conducted to predict the device performance. The supramolecular CrypA was synthesized from vanillyl alcohol using a double trimerisation method and deposited onto the SAW propagation path of the sensing resonators via different film deposition methods. Experiential results indicate the CrypA-coated sensor made using a dropping method exhibits higher sensor response compared to the unit prepared by the spinning approach because of the obviously larger surface roughness. Fast response and excellent repeatability were observed in gas sensing experiments, and the estimated detection limit and measured sensitivity are ~0.05% and ~204 Hz/%, respectively.

The effect of the sensitive area of the two-port resonator configuration on the mass sensitivity of a Rayleigh surface acoustic wave (R-SAW) sensor was investigated theoretically, and verified in experiments. A theoretical model utilizing a 3-dimensional finite element method (FEM) approach was established to extract the coupling-of-modes (COM) parameters in the absence and presence of mass loading covering the electrode structures. The COM model was used to simulate the frequency response of an R-SAW resonator by a P-matrix cascading technique. Cascading the P-matrixes of unloaded areas with mass loaded areas, the sensitivity for different sensitive areas was obtained by analyzing the frequency shift. The performance of the sensitivity analysis was confirmed by the measured responses from the silicon dioxide (SiO₂) deposited on different sensitive areas of R-SAW resonators. It is shown that the mass sensitivity varies strongly for different sensitive areas, and the optimal sensitive area lies towards the center of the device.

A polymer-coated surface acoustic wave (SAW)-based chemical sensor for organophosphorous compound sensing at extremely low concentrations was developed, in which a dual-delay-line oscillator coated with fluoroalcoholpolysiloxane (SXFA) acted as the sensor element. Response mechanism analysis was performed on the SXFA-coated chemical sensor, resulting in the optimal design parameters. The shear modulus of the SXFA, which is the key parameter for theoretical simulation, was extracted experimentally. New designs were done on the SAW devices to decrease the insertion loss. Referring to the new phase modulation approach, superior short-term frequency stability (±2 Hz in seconds) was achieved from the SAW oscillator using the fabricated 300 MHz delay line as the feedback element. In the sensor experiment on dimethylmethylphosphonate (DMMP) detection, the fabricated SXFA-coated chemical sensor exhibited an excellent threshold detection limit up to 0.004 mg/m³ (0.7 ppb) and good sensitivity (~485 Hz/mg/m³ for a DMMP concentration of 2~14 mg/m³).

A surface-acoustic-wave (SAW) gas sensor with a low detection limit and fast response for volatile organic compounds (VOCs) based on the condensate-adsorption effect detection is developed. In this sensor a gas chromatography (GC) column acts as the separator element and a dual-resonator oscillator acts as the detector element. Regarding the surface effective permittivity method, the response mechanism analysis, which relates the condensate-adsorption effect, is performed, leading to the sensor performance prediction prior to fabrication. New designs of SAW resonators, which act as feedback of the oscillator, are devised in order to decrease the insertion loss and to achieve single-mode control, resulting in superior frequency stability of the oscillator. Based on the new phase modulation approach, excellent short-term frequency stability (±3 Hz/s) is achieved with the SAW oscillator by using the 500 MHz dual-port resonator as feedback element. In a sensor experiment investigating formaldehyde detection, the implemented SAW gas sensor exhibits an excellent threshold detection limit as low as 0.38 pg.

Design, fabrication and experiments of a miniature particulate matter (PM) 2.5 sensor based on the surface acoustic wave (SAW) technology were proposed. The sensor contains a virtual impactor (VI) for particle separation, a thermophoretic precipitator (TP) for PM_2.5 capture and a SAW sensor chip for PM_2.5 mass detection. The separation performance of the VI was evaluated by using the finite element method (FEM) model and the PM_2.5 deposition characteristic in the TP was obtained by analyzing the thermophoretic theory. Employing the coupling-of-modes (COM) model, a low loss and high-quality SAW resonator was designed. By virtue of the micro electro mechanical system (MEMS) technology and semiconductor technology, the SAW based PM_2.5 sensor detecting probe was fabricated. Then, combining a dual-port SAW oscillator and an air sampler, the experimental platform was set up. Exposing the PM_2.5 sensor to the polystyrene latex (PSL) particles in a chamber, the sensor performance was evaluated. The results show that by detecting the PSL particles with a certain diameter of 2 μm, the response of the SAW based PM_2.5 sensor is linear, and in accordance with the response of the light scattering based PM_2.5 monitor. The developed SAW based PM_2.5 sensor has great potential for the application of airborne particle detection.

Self-assembly and molecular imprinting technologies are very attractive technologies for the development of artificial recognition systems and provide chemical recognition based on need and not happenstance. In this paper, we employed a b-cyclodextrin derivative surface acoustic wave (SAW) chemical sensor for detecting the chemical warfare agents (CWAs) sarin (O-Isoprophyl methylphosphonofluoridate, GB). Using sarin acid (isoprophyl hydrogen methylphosphonate) as an imprinting template, mono[6-deoxy-6-[(mercaptodecamethylene)thio]]-β-cyclodextrin was prepared by self-assembled method on one of the SAW oscillators. After templates’ removal, a sensitive and selective molecular imprinting (MIP) monolayer for GB was prepared. Electrochemical impedance spectroscopy and atomic force microscope (AFM) were used to characterize this film. Comparing the detection results to GB by MIP film and non-MIP film, the molecularly imprinting effect was also proved. The resulting SAW sensor could detect sarin as low as 0.10 mg/m³ at room temperature and the frequency shift was about 300 Hz. The response frequency increased linearly with increasing sarin concentration in the range of 0.7 mg/m³~3.0 mg/m³. When sarin was detected under different temperatures, the SAW sensor exhibited outstanding sensitivity and reliability.