The effect of the sensitive area of the two-port resonator configuration on the mass sensitivity of a Rayleigh surface acoustic wave (R-SAW) sensor was investigated theoretically, and verified in experiments. A theoretical model utilizing a 3-dimensional finite element method (FEM) approach was established to extract the coupling-of-modes (COM) parameters in the absence and presence of mass loading covering the electrode structures. The COM model was used to simulate the frequency response of an R-SAW resonator by a P-matrix cascading technique. Cascading the P-matrixes of unloaded areas with mass loaded areas, the sensitivity for different sensitive areas was obtained by analyzing the frequency shift. The performance of the sensitivity analysis was confirmed by the measured responses from the silicon dioxide (SiO₂) deposited on different sensitive areas of R-SAW resonators. It is shown that the mass sensitivity varies strongly for different sensitive areas, and the optimal sensitive area lies towards the center of the device.

A surface-acoustic-wave (SAW) gas sensor with a low detection limit and fast response for volatile organic compounds (VOCs) based on the condensate-adsorption effect detection is developed. In this sensor a gas chromatography (GC) column acts as the separator element and a dual-resonator oscillator acts as the detector element. Regarding the surface effective permittivity method, the response mechanism analysis, which relates the condensate-adsorption effect, is performed, leading to the sensor performance prediction prior to fabrication. New designs of SAW resonators, which act as feedback of the oscillator, are devised in order to decrease the insertion loss and to achieve single-mode control, resulting in superior frequency stability of the oscillator. Based on the new phase modulation approach, excellent short-term frequency stability (±3 Hz/s) is achieved with the SAW oscillator by using the 500 MHz dual-port resonator as feedback element. In a sensor experiment investigating formaldehyde detection, the implemented SAW gas sensor exhibits an excellent threshold detection limit as low as 0.38 pg.

Design, fabrication and experiments of a miniature particulate matter (PM) 2.5 sensor based on the surface acoustic wave (SAW) technology were proposed. The sensor contains a virtual impactor (VI) for particle separation, a thermophoretic precipitator (TP) for PM_2.5 capture and a SAW sensor chip for PM_2.5 mass detection. The separation performance of the VI was evaluated by using the finite element method (FEM) model and the PM_2.5 deposition characteristic in the TP was obtained by analyzing the thermophoretic theory. Employing the coupling-of-modes (COM) model, a low loss and high-quality SAW resonator was designed. By virtue of the micro electro mechanical system (MEMS) technology and semiconductor technology, the SAW based PM_2.5 sensor detecting probe was fabricated. Then, combining a dual-port SAW oscillator and an air sampler, the experimental platform was set up. Exposing the PM_2.5 sensor to the polystyrene latex (PSL) particles in a chamber, the sensor performance was evaluated. The results show that by detecting the PSL particles with a certain diameter of 2 μm, the response of the SAW based PM_2.5 sensor is linear, and in accordance with the response of the light scattering based PM_2.5 monitor. The developed SAW based PM_2.5 sensor has great potential for the application of airborne particle detection.

A new micro gyroscope based on the surface acoustic wave (SAW) gyroscopic effect was developed. The SAW gyroscopic effect is investigated by applying the surface effective permittivity method in the regime of small ratios of the rotation velocity and the frequency of the SAW. The theoretical analysis indicates that the larger velocity shift was observed from the rotated X-112°Y LiTaO₃ substrate. Then, two SAW delay lines with reverse direction and an operation frequency of 160 MHz are fabricated on a same X-112°Y LiTaO₃ chip as the feedback of two SAW oscillators, which act as the sensor element. The single-phase unidirectional transducer (SPUDT) and combed transducers were used to structure the delay lines to improve the frequency stability of the oscillator. The rotation of a piezoelectric medium gives rise to a shift of the propagation velocity of SAW due to the Coriolis force, resulting in the frequency shift of the SAW device, and hence, the evaluation of the sensor performance. Meanwhile, the differential structure was performed to double the sensitivity and compensate for the temperature effects. Using a precise rate table, the performance of the fabricated SAW gyroscope was evaluated experimentally. A sensitivity of 1.332 Hz deg⁻¹ s at angular rates of up to 1,000 deg s⁻¹ and good linearity are observed.

A new surface acoustic wave (SAW)-based rate sensor pattern incorporating metallic dot arrays was developed in this paper. Two parallel SAW delay lines with a reverse direction and an operation frequency of 80 MHz on a same X-112°Y LiTaO₃ wafer are fabricated as the feedback of two SAW oscillators, and mixed oscillation frequency was used to characterize the external rotation. To enhance the Coriolis force effect acting on the SAW propagation, a copper (Cu) dot array was deposited along the SAW propagation path of the SAW devices. The approach of partial-wave analysis in layered media was referred to analyze the response mechanisms of the SAW based rate sensor, resulting in determination of the optimal design parameters. To improve the frequency stability of the oscillator, the single phase unidirectional transducers (SPUDTs) and combed transducer were used to form the SAW device to minimize the insertion loss and accomplish the single mode selection, respectively. Excellent long-term (measured in hours) frequency stability of 0.1 ppm/h was obtained. Using the rate table with high precision, the performance of the developed SAW rate sensor was evaluated experimentally; satisfactory detection sensitivity (16.7 Hz∙deg∙s⁻¹) and good linearity were observed.

Introduction: A novel analytical method using fast gas chromatography combined with surface acoustic wave sensor (GC-SAW) was developed for rapid determination of the pharmacological volatiles of turmeric (Curcuma longa L.). Methods: The volatile compounds in 20 turmeric samples, collected from different parts and different origins, were assessed by the fast GC-SAW. In addition, gas chromatography–mass spectrometry (GC-MS) was employed to confirm the chemical composition of the main volatiles. The digital fingerprint of turmeric was established and analysed by principal component analysis and cluster analysis. Results: Curcumene (9.1%), β-sesquiphellandrene (5.1%) and ar-turmerone (69.63%) were confirmed as the main pharmacological volatiles of turmeric. The content of ar-turmerone in lateral rhizome turmeric was significantly higher than that of top rhizome and ungrouped turmeric. The contents of curcumene and β-sesquiphellandrene in top rhizome turmeric were higher than those in lateral and ungrouped turmeric. The 20 turmeric samples were divided into four categories, which reflected the quality characteristics of the turmeric from different parts and origins. Conclusion: The GC-SAW method can rapidly and accurately detect pharmacologically volatiles of turmeric, and it can be used in the quality control of turmeric.