Pyroelectric infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric films is improved through annealing at a temperature of 500 °C for 4 h. The temperature variation and voltage responsivity of the fabricated sensors are evaluated numerically and experimentally for substrate thickness in the range of 1 to 500 μm. The results show that the temperature variation and voltage responsivity both increase with a reducing substrate thickness. For the lowest film thickness of 1 μm, the sensor achieves a voltage sensitivity of 3880 mV/mW at a cutoff frequency of 400 Hz. In general, the results presented in this study provide a useful source of reference for the further development of MEMS-based pyroelectric infrared sensors.

A microfluidic distillation system is proposed to facilitate the separation and subsequent determination of propionic acid (PA) in foods. The system comprises two main components: (1) a polymethyl methacrylate (PMMA) micro-distillation chip incorporating a micro-evaporator chamber, a sample reservoir, and a serpentine micro-condensation channel; and (2) and a DC-powered distillation module with built-in heating and cooling functions. In the distillation process, homogenized PA sample and de-ionized water are injected into the sample reservoir and micro-evaporator chamber, respectively, and the chip is then mounted on a side of the distillation module. The de-ionized water is heated by the distillation module, and the steam flows from the evaporation chamber to the sample reservoir, where it prompts the formation of PA vapor. The vapor flows through the serpentine microchannel and is condensed under the cooling effects of the distillation module to produce a PA extract solution. A small quantity of the extract is transferred to a macroscale HPLC and photodiode array (PDA) detector system, where the PA concentration is determined using a chromatographic method. The experimental results show that the microfluidic distillation system achieves a distillation (separation) efficiency of around 97% after 15 min. Moreover, in tests performed using 10 commercial baked food samples, the system achieves a limit of detection of 50 mg/L and a limit of quantitation of 96 mg/L, respectively. The practical feasibility of the proposed system is thus confirmed.