Recent years have seen rapid development of chip-scale atomic devices due to their great potential in the field of biomedical imaging, namely chip-scale atomic magnetometers that enable high resolution magnetocardiography (MCG) and magnetoencephalography (MEG). For atomic devices of this kind, vertical cavity surface emitting lasers (VCSELs) have become the most crucial components as integrated pumping sources, which are attracting growing interest. In this paper, the application of VCSELs in chip-scale atomic devices are reviewed, where VCSELs are integrated in various atomic bio-sensing devices with different operating environments. Secondly, the mode and polarization control of VCSELs in the specific applications are reviewed with their pros and cons discussed. In addition, various packaging of VCSEL based on different atomic devices in pursuit of miniaturization and precision measurement are reviewed and discussed. Finally, the VCSEL-based chip-scale atomic magnetometers utilized for cardiac and brain magnetometry are reviewed in detail. Nowadays, biosensors with chip integration, low power consumption, and high sensitivity are undergoing rapid industrialization, due to the growing market of medical instrumentation and portable health monitoring. It is promising that VCSEL-integrated chip-scale atomic biosensors as featured applications of this kind may experience extensive development in the near future.

The emergence of biomagnetism imaging has led to the development of ultrasensitive and compact spin-exchange relaxation-free (SERF) atomic magnetometers that promise high-resolution magnetocardiography (MCG) and magnetoencephalography (MEG). However, conventional optical components are not compatible with nanofabrication processes that enable the integration of atomic magnetometers on chips, especially for elliptically polarized laser-pumped SERF magnetometers with bulky optical systems. In this study, an elliptical-polarization pumping beam (at 795 nm) is achieved through a single-piece metasurface, which results in an SERF magnetometer with a high sensitivity reaching 10.61 fT/Hz^1/2 by utilizing a ⁸⁷Rb vapor cell with a 3 mm inner diameter. To achieve the optimum theoretical polarization, our design combines a computer-assisted optimization algorithm with an emerging metasurface design process. The metasurface is fabricated with 550 nm thick silicon-rich silicon nitride on a 2 × 2 cm² SiO₂ substrate and features a 22.17° ellipticity angle (a deviation from the target polarization of less than 2%) and more than 80% transmittance. This study provides a feasible approach for on-chip polarization control of future all-integrated atomic magnetometers, which will further pave the way for high-resolution biomagnetism imaging and portable atomic sensing applications.

In recent years, significant developments have occurred in the field of optically pumped magnetometers (OPMs), which are widely used in biomagnetic measurements. In this study, we propose a temperature optimization model for a single-beam miniaturized atomic magnetometer. Based on this model, we find that there is an optimal operating temperature for each individual vapor cell, under which the OPM achieves optimal performance. We construct a single-beam zero-field modulation OPM to prove this model. The sensitivity of the magnetometer reaches 18 fT/Hz ^1/2 (close to the theoretical sensitivity) when we adjust the temperature of the vapor cell through our model, and a detection bandwidth of more than 160 Hz is achieved. It is also discovered that the system bandwidth is reduced when the temperature is increased, whereas the sensitivity of the system does not show notable variation during this process. Our model enables a quick definition of the best working temperature for each individual magnetometer, ensuring the best performance at the lowest operating temperature. This model is especially advantageous for miniaturized OPMs and can also be further applied to arrayed integration for biomagnetic measurement in the future work.

Alkali vapor cells are the core components of atomic sensing instruments such as atomic gyroscopes, atomic magnetometers, atomic clocks, etc. Emerging integrated atomic sensing devices require high-performance miniaturized alkali vapor cells, especially micro-fabricated vapor cells. In this review, bonding methods for vapor cells of this kind are summarized in detail, including anodic bonding, sacrificial micro-channel bonding, and metal thermocompression bonding. Compared with traditional through-lighting schemes, researchers have developed novel methods for micro-fabricated vapor cells under both single- and double-beam schemes. In addition, emerging packaging methods for alkali metals in micro-fabricated vapor cells can be categorized as physical or chemical approaches. Physical methods include liquid transfer and wax pack filling. Chemical methods include the reaction of barium azide with rubidium chloride, ultraviolet light decomposition (of rubidium azide), and the high-temperature electrolysis of rubidium-rich glass. Finally, the application trend of micro-fabricated alkali vapor cells in the field of micro-scale gyroscopes, micro-scale atomic clocks, and especially micro-scale biomagnetometers is reviewed. Currently, the sensing industry has become a major driving force for the miniaturization of atomic sensing devices, and in the near future, the micro-fabricated alkali vapor cell technology of atomic sensing devices may experience extensive developments.

Atomic magnetometers (AMs) are widely acknowledged as one of the most sensitive kind of instruments for bio-magnetic field measurement. Recently, there has been growing interest in developing chip-scale AMs through nanophotonics and current CMOS-compatible nanofabrication technology, in pursuit of substantial reduction in volume and cost. In this study, an integrated polarization-splitting grating coupler is demonstrated to achieve both efficient coupling and polarization splitting at the D1 transition wavelength of rubidium (795 nm). With this device, linearly polarized probe light that experienced optical rotation due to magnetically induced circular birefringence (of alkali medium) can be coupled and split into individual output ports. This is especially advantageous for emerging chip-scale AMs in that differential detection of ultra-weak magnetic field can be achieved through compact planar optical components. In addition, the device is designed with silicon nitride material on silicon dioxide that is deposited on a silicon substrate, being compatible with the current CMOS nanofabrication industry. Our study paves the way for the development of on-chip AMs that are the foundation for future multi-channel high-spatial resolution bio-magnetic imaging instruments.