Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties, including high thermal stability, mechanical strength, and chemical resistance values. In the past decade, rapid progress has been made in the microfabrication of polyimides. However, enabling technologies, such as laser-induced graphene on polyimide, photosensitive polyimide micropatterning, and 3D polyimide microstructure assembly, have not been reviewed from the perspective of polyimide microfabrication. The aims of this review are to systematically discuss polyimide microfabrication techniques, which cover film formation, material conversion, micropatterning, 3D microfabrication, and their applications. With an emphasis on polyimide-based flexible MEMS devices, we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field.

Fish are able to perceive the surrounding weak flow and pressure variations with their mechanosensory lateral line system, which consists of a superficial lateral line for flow velocity detection and a canal lateral line for flow pressure gradient perception. Achieving a better understanding of the flow field perception algorithms of the lateral line can contribute not only to the design of highly sensitive flow sensors, but also to the development of underwater smart skin with good hydrodynamic imaging properties. In this review, we discuss highly sensitive flow-sensing mechanisms for superficial and canal neuromasts and flow field perception algorithms. Artificial lateral line systems with different transduction mechanisms are then described with special emphasis on the recent innovations in the field of polymer-based artificial flow sensors. Finally, we discuss our perspective of the technological challenges faced while improving flow sensitivity, durability, and sensing fusion schemes.

Piezoelectric poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) nanofibers fabricated by electrospinning have drawn increasing levels of attention in the fields of flexible sensors and nanogenerators. However, the directional dependence of piezoelectricity of electrospun nanofibers remains elusive. In this study, the piezoelectric performances of individual nanofibers are characterized by piezoresponse force microscopy (PFM), while the effects of annealing on β-phase crystallinities are investigated by X-ray diffraction (XRD) and Fourier transform infrared (FTIR) spectroscopy. The experimental results reveal that the as-spun P(VDF-TrFE) nanofibers form higher content of β-phase compared with spin-coated films, and the content of β-phase increases by annealing. The annealed P(VDF-TrFE) nanofiber exhibits distinct vertical polarization switching characteristics. The high piezoelectric output in the thickness direction and low piezoelectric output in the longitudinal direction of the nanofiber mats further confirm that the preferential dipole orientation of electrospun P(VDF-TrFE) nanofibers is normal to the surface of the substrate. Highly aligned P(VDF-TrFE) nanofibers show directional strain sensing ability due to the piezoelectric and mechanical anisotropy.