Global modeling of inductively coupled plasma (ICP) reactors is a powerful tool to investigate plasma parameters. In this article, the argon ICP global model is revisited to explore the effect of excited species on collisional energy through the study of different approaches to particle and energy balance equations. The collisional energy loss is much more sensitive to modifications in the balance equations than the electron temperature. According to the simulations, the multistep ionization reduces the collisional energy loss in all investigated reaction sets and the inclusion of heavy species reactions has negligible influence. The plasma parameters obtained, such as total energy loss and electron temperature, were compared with experimental results from the literature. The simulated cases that have more excited species and reactions in the energy balance are in better agreement with the experimental measurements.

This work reports on the (zero-dimensional) global model study of argon plasma chemistry for a cylindrical thruster based on inductively coupled plasma (ICP) whose output has a system of two grids polarized with each other with direct current potential. The global model developed is based on particle and energy balance equations, where the latter considers both charged and neutral species. Thus, the model allows the determination of the neutral gas temperature. Finally, this study also investigated the role of excited species in plasma chemistry especially in the ions production and its implications for propulsion parameters, such as thrust. For this, the study was carried out in two different scenarios: (1) one taking into account the metastable species Ar^r and Ar^p (multi-step ionization), and (2) the other without these species (single-step ionization). Results indicates a distinct behavior of electron temperature with radiofrequency (RF) power for the investigated cases. On the other hand, the gas temperature is almost the same for investigated power range of up to 900 W. Concern propulsion analysis, a thrust of 40 mN at 450 W was verified for case (1), which represents a remarkable thrust value for electric thrusters.