This work presents a thermoelectric micro generator fabricated by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and the post-CMOS process. The micro generator is composed of 24 thermocouples in series. Each thermocouple is constructed by p-type and n-type polysilicon strips. The output power of the generator depends on the temperature difference between the hot and cold parts in the thermocouples. In order to prevent heat-receiving in the cold part in the thermocouples, the cold part is covered with a silicon dioxide layer with low thermal conductivity to insulate the heat source. The hot part of the thermocouples is suspended and connected to an aluminum plate, to increases the heat-receiving area in the hot part. The generator requires a post-CMOS process to release the suspended structures. The post-CMOS process uses an anisotropic dry etching to remove the oxide sacrificial layer and an isotropic dry etching to etch the silicon substrate. Experimental results show that the micro generator has an output voltage of 67 μV at the temperature difference of 1 K.

This study describes the fabrication of an ammonia gas sensor (AGS) using a complementary metal oxide semiconductor (CMOS)–microelectromechanical system (MEMS) technique. The structure of the AGS features interdigitated electrodes (IDEs) and a sensing material on a silicon substrate. The IDEs are the stacked aluminum layers that are made using the CMOS process. The sensing material; polypyrrole/reduced graphene oxide (PPy/RGO), is synthesized using the oxidation–reduction method; and the material is characterized using an electron spectroscope for chemical analysis (ESCA), a scanning electron microscope (SEM), and high-resolution X-ray diffraction (XRD). After the CMOS process; the AGS needs post-processing to etch an oxide layer and to deposit the sensing material. The resistance of the AGS changes when it is exposed to ammonia. A non-inverting amplifier circuit converts the resistance of the AGS into a voltage signal. The AGS operates at room temperature. Experiments show that the AGS response is 4.5% at a concentration of 1 ppm NH₃; and it exhibits good repeatability. The lowest concentration that the AGS can detect is 0.1 ppm NH₃

The fabrication and characterization of a thermoelectric energy harvester using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technology were presented. The thermoelectric energy harvester is composed of eight circular energy harvesting cells, and each cell consists of 25 thermocouples in series. The thermocouples are made of p-type and n-type polysilicons. The output power of the energy harvester relies on the number of the thermocouples. In order to enhance the output power, the energy harvester increases the thermocouple number per area. The energy harvester requires a post-CMOS process to etch the sacrificial silicon dioxide layer and the silicon substrate to release the suspended structures of hot part. The experimental results show that the energy harvester has an output voltage per area of 0.178 mV·mm⁻²·K⁻¹ and a power factor of 1.47 × 10⁻³ pW·mm⁻²·K⁻².

An acoustic tonometer that measures shifts in resonance frequencies associated with intraocular pressure (IOP) could provide an opportunity for a type of tonometer that can be operated at home or worn by patients. However, there is insufficient theoretical background, especially with respect to the uncertainty in operating frequency ranges and the unknown relationships between IOPs and resonance frequencies. The purpose of this paper is to develop a frequency function for application in an acoustic tonometer. A linear wave theory is used to derive an explicit frequency function, consisting of an IOP and seven other physiological parameters. In addition, impulse response experiments are performed to measure the natural frequencies of porcine eyes to validate the provided function. From a real-time detection perspective, explicitly providing a frequency function can be the best way to set up an acoustic tonometer. The theory shows that the resonance oscillation of the eyeball is mainly dominated by liquid inside the eyeball. The experimental validation demonstrates the good prediction of IOPs and resonance frequencies. The proposed explicit frequency function supports further modal analysis not only of the dynamics of eyeballs, but also of the natural frequencies, for further development of the acoustic tonometer.