Lithium niobate (LiNbO3 or LN) is a well-known multifunctional crystal that has been widely applied in various areas of photonics, electronics, and optoelectronics. In the past decade, “ion-cut” has become the key technique to produce wafer-size, high-quality, sub micrometer-thickness crystalline LiNbO3 thin films, i.e., lithium-niobate-on-insulator (LNOI). With the rapid development of LNOI technology and the tremendous progress of associated surface structuring and engineering techniques over the last few years, many novel chip-integrated LiNbO3-based devices and applications with reduced cost, complexity, power, and size, are demonstrated, boosting the resurgence of integrated photonics based on this material. The remarkable achievements are largely facilitated by the most recent technological progress in photonic integration and performance optimization of LNOI on-chip devices, such as high-quality surface domain engineering, advanced heterogeneous integration technology, powerful dispersion engineering, fine polishing lithography, and wafer-scale fabrication. Accordingly, batch-compatible chip-integrated platforms for more complex photonic integrated circuits, such as quantum optical circuits, are within reach. This article provides a timely review of the key advances in LNOI technology and a reasonable perspective on the near-future directions for both integrated photonics and applied physics communities.
Optical waveguides are far more than mere connecting elements in integrated optical systems and circuits. Benefiting from their high optical confinement and miniaturized footprints, waveguide structures established based on crystalline materials, particularly, are opening exciting possibilities and opportunities in photonic chips by facilitating their on-chip integration with different functionalities and highly compact photonic circuits. Femtosecond-laser-direct writing (FsLDW), as a true three-dimensional (3D) micromachining and microfabrication technology, allows rapid prototyping of on-demand waveguide geometries inside transparent materials via localized material modification. The success of FsLDW lies not only in its unsurpassed aptitude for realizing 3D devices but also in its remarkable material-independence that enables cross-platform solutions. This review emphasizes FsLDW fabrication of waveguide structures with 3D layouts in dielectric crystals. Their functionalities as passive and active photonic devices are also demonstrated and discussed.
Chip-integrated whispering-gallery resonators (WGRs) enable compact and wavelength-agile nonlinear optical frequency synthesizers. So far, the most flexible phase-matching technique, i.e., quasi-phase matching, has not been applied in this configuration. The reason is the lack of suitable thin films with alternating crystal structure on a low-refractive-index substrate. Here, we demonstrate an innovative method of realizing thin film substrates suitable for quasi-phase matching by field-assisted domain engineering of lithium niobate, and subsequent direct bonding and polishing. We are able to fabricate high- on-chip WGRs with these substrates by using standard semiconductor manufacturing techniques. The -factors of the resonators are up to one million, which allows us to demonstrate quasi-phase-matched second-harmonic generation in on-chip WGRs for the first time, to the best of our knowledge. The normalized conversion efficiency is . This method can also be transferred to other material systems.
We report on the fabrication of depressed cladding waveguide lasers in Nd:YAG (neodymium doped yttrium aluminum garnet, Nd:Y3Al5O12) ceramics microstructured by femtosecond laser pulses. Full control over the confined light spatial distribution is demonstrated by the fabrication of high contrast waveguides with hexagonal, circular and trapezoidal configurations. The confocal fluorescence measurements of the waveguides reveal that the original luminescence features of Nd3+ ions are well-preserved in the waveguide regions. Under optical pump at 808 nm, cladding waveguides showed continuous wave efficient laser oscillation. The maximum output power obtained at 1064.5 nm is ~181 mW with a slope efficiency as high as 44%, which suggests that the fabricated Nd:YAG ceramic waveguides are promising candidates for efficient integrated laser sources.
Optical frequency combs are key to optical precision measurements. While most frequency combs operate in the near-infrared (NIR) regime, many applications require combs at mid-infrared (MIR), visible (VIS), or even ultra-violet (UV) wavelengths. Frequency combs can be transferred to other wavelengths via nonlinear optical processes; however, this becomes exceedingly challenging for high-repetition-rate frequency combs. Here it is demonstrated that a synchronously driven high- microresonator with a second-order optical nonlinearity can efficiently convert high-repetition-rate NIR frequency combs to VIS, UV, and MIR wavelengths, providing new opportunities for microresonator and electro-optic combs in applications including molecular sensing, astronomy, and quantum optics.