In recent years, we have been witnessing the intensive development of optical gas sensors. Thin palladium and platinum films as well as tungsten trioxide films with palladium or platinum catalysts are widely used for hydrogen detection, and the optical constants of these materials are required for sensor development. We report the optical parameters retrieved from a set of ellipsometric and transmission spectra for electron-beam evaporated palladium, platinum, and tungsten trioxide films. The tungsten trioxide films were 81 nm, 162 nm, and 515 nm thick and the metal films were as thin as 5–7 nm. Ultrathin palladium and platinum films were shown to be successfully described by local and isotropic permittivity, which is quite different from known bulk values. However, this permittivity showed a strong dependence on adjacent materials, thus illustrating that the ultrathin metallic films can be considered composites characterized by effective permittivity. With the obtained refractive indices and permittivities, the optical spectra of fabricated WO₃/Pd and WO₃/Pt nanostructures incorporating 1D grating of Al₂O₃ were in an excellent agreement with the calculated ones without requiring any additional fitting procedures or inclusion of surface roughness layers in numerical models.

Low-loss photonic integrated circuits (PICs) are the key elements in future quantum technologies, nonlinear photonics and neural networks. The low-loss photonic circuits technology targeting C-band application is well established across multi-project wafer (MPW) fabs, whereas near-infrared (NIR) PICs suitable for the state-of-the-art single-photon sources are still underdeveloped. Here, we report the labs-scale process optimization and optical characterization of low-loss tunable photonic integrated circuits for single-photon applications. We demonstrate the lowest propagation losses to the date (as low as 0.55 dB/cm at 925 nm wavelength) in single-mode silicon nitride submicron waveguides (220×550 nm). This performance is achieved due to advanced e-beam lithography and inductively coupled plasma reactive ion etching steps which yields waveguides vertical sidewalls with down to 0.85 nm sidewall roughness. These results provide a chip-scale low-loss PIC platform that could be even further improved with high quality SiO₂ cladding, chemical-mechanical polishing and multistep annealing for extra-strict single-photon applications.

At the present time, ultrahigh performance superconducting nanowire single-photon detectors are the key elements in a variety of devices from biological research to quantum communications and computing. Accurate tuning of superconducting material properties is a powerful resource for fabricating single-photon detectors with desired properties. Here, we report on the major theoretical relations between ultrathin niobium nitride (NbN) film properties and superconducting nanowire single-photon detector characteristics, as well as the dependence of ultrathin NbN film properties on reactive magnetron sputtering recipes. Based on this study, we formulate the exact requirements for ultrathin NbN films for ultrahigh performance superconducting nanowire single-photon detectors. Then, we experimentally studied the properties of ultrathin NbN films (morphology, crystalline structure, critical temperature, and sheet resistance) on silicon, sapphire, silicon dioxide, and silicon nitride substrates sputtered with various recipes. We demonstrate ultrathin NbN films (obtained with more than 100 films deposition) with a wide range of critical temperature from 2.5 to 12.1 K and sheet resistance from 285 to 2000 Ω/sq and report a sheet resistance evolution of more than 40% within two years. Finally, we found out that one should use ultrathin NbN films with a specific critical temperature near 9.5 K and a sheet resistance of about 350 Ω/sq for ultrahigh performance state-of-the-art superconducting nanowire single-photon detectors at 1550 nm wavelength.

Silver and gold are the most commonly used materials in optics and plasmonics. Silver has the lowest optical losses in the visible and near-infrared wavelength range, but it faces a serious problem—degradation over time. It has been repeatedly reported that the optical properties of silver thin films rapidly degrade when exposed to the atmosphere. This phenomenon was described by various mechanisms: rapid silver oxidation, sorption of sulfur or oxygen, formation of silver compounds with chlorine, sulfur, and oxygen. In this work, we systematically studied single-crystalline silver films from 25 to 70 nm thicknesses for almost two years. The surface morphology, crystalline structure and optical characteristics of the silver films were measured using spectroscopic ellipsometry, ultra-high-resolution scanning electron microscopy, and stylus profilometry under standard laboratory conditions. After 19 months, bulk structures appeared on the surface of thin films. These structures are associated with relaxation of internal stresses combined with dewetting. Single-crystalline silver films deposited using the single-crystalline continuous ultra-smooth, low-loss, low-cost (SCULL) technology with a thickness of 35–50 nm demonstrated the best stability in terms of degradation. We have shown that the number of defects (grain boundaries and joints of terraces) is one of the key factors that influence the degradation intensity of silver films.

Photonic integrated circuits play a crucial role in almost every aspect of modern life, such as data storage, telecommunications, medical diagnostics, green energy, autonomous driving, agriculture, and high-performance computing. To fully harness their benefits, an efficient coupling mechanism is required to successfully launch light into on-chip waveguides from fibers. This study introduces low-loss coupling strategies and their implementation for silicon nitride integrated photonics. Here we present an overview of coupling technologies, optimized designs, and a fabrication technique for inverse tapers, which enable effective coupling for both transverse-magnetic and transverse-electric modes. We measured the coupling losses of 0.15 dB for UHNA-7 fiber at 1550 nm per facet for single-mode 220 × 1200 nm waveguides. We also designed, fabricated, and experimentally characterized a multi-tip taper, yielding 1.5 dB per facet at 1550 nm with broadband stability over 1500–1600 nm. We believe that our approach is universal and can be used both for individual fiber and fiber arrays coupling and for subsequent assembly of fiber with a chip, ensuring minimal losses.