In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline leaks. The proposed MEMS Hydrophone consists of a piezoelectric micromachined ultrasonic transducer (PMUT) array, an acoustic matching layer and a pre-amplifier amplifier circuit. The array has 4 (2 × 2) PMUT elements with a first-order resonant frequency of 41.58 kHz. Due to impedance matching of the acoustic matching layer and the 40 dB gain of the pre-amplifier amplifier circuit, the packaged MEMS Hydrophone has a high sound pressure sensitivity of −170 ± 2 dB (re: 1 V/μPa). The performance with respect to detecting pipeline leaks and locating leak points is demonstrated on a 31 m stainless leaking pipeline platform. The standard deviation (STD) of the hydroacoustic signal and Monitoring Index Efficiency (MIE) are extracted as features of the pipeline leak. A random forest model is trained for accurately classifying the leak and no-leak cases using the above features, and the accuracy of the model is about 97.69%. The cross-correlation method is used to locate the leak point, and the localization relative error is about 10.84% for a small leak of 12 L/min.

Partial discharge (PD) localization is important for monitoring and maintaining high-voltage equipment, which can help to prevent accidents. In this work, an acoustic localization sensor based on microelectromechanical system (MEMS) microphone array is proposed, which can detect and locate the partial discharge through a beam-forming algorithm. The MEMS microphone array consists of eight commercial MEMS microphones (SPV08A0LR5H-1, Knowles Electronics, IL, USA) with an aperture size of about 0.1 m × 0.1 m, allowing for a small hardware size and low cost. In order to optimize the acoustic performance of the array, a random array topology is designed. The simulation analysis indicates that the designed random topology is superior to several commonly used topologies. In terms of the localization algorithm, a deconvolution method called Fourier-based fast iterative shrinkage thresholding algorithm (FFT-FISTA) is applied. Simulation and experiment results demonstrate that FFT-FISTA used in the proposed acoustic localization sensor has significant advantages over the conventional beam-forming algorithm on spatial resolution and sidelobe suppression. Experimental results also show that the average localization error of the proposed scheme is about 0.04 m, which can meet the demands of practical application.