In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline leaks. The proposed MEMS Hydrophone consists of a piezoelectric micromachined ultrasonic transducer (PMUT) array, an acoustic matching layer and a pre-amplifier amplifier circuit. The array has 4 (2 × 2) PMUT elements with a first-order resonant frequency of 41.58 kHz. Due to impedance matching of the acoustic matching layer and the 40 dB gain of the pre-amplifier amplifier circuit, the packaged MEMS Hydrophone has a high sound pressure sensitivity of −170 ± 2 dB (re: 1 V/μPa). The performance with respect to detecting pipeline leaks and locating leak points is demonstrated on a 31 m stainless leaking pipeline platform. The standard deviation (STD) of the hydroacoustic signal and Monitoring Index Efficiency (MIE) are extracted as features of the pipeline leak. A random forest model is trained for accurately classifying the leak and no-leak cases using the above features, and the accuracy of the model is about 97.69%. The cross-correlation method is used to locate the leak point, and the localization relative error is about 10.84% for a small leak of 12 L/min.

In this paper, a high-sensitivity microelectromechanical system (MEMS) piezoelectric accelerometer based on a Scandium-doped Aluminum Nitride (ScAlN) thin film is proposed. The primary structure of this accelerometer is a silicon proof mass fixed by four piezoelectric cantilever beams. In order to enhance the sensitivity of the accelerometer, the Sc_0.2Al_0.8N piezoelectric film is used in the device. The transverse piezoelectric coefficient d₃₁ of the Sc_0.2Al_0.8N piezoelectric film is measured by the cantilever beam method and found to be −4.7661 pC/N, which is approximately two to three times greater than that of a pure AlN film. To further enhance the sensitivity of the accelerometer, the top electrodes are divided into inner and outer electrodes; then, the four piezoelectric cantilever beams can achieve a series connection by these inner and outer electrodes. Subsequently, theoretical and finite element models are established to analyze the effectiveness of the above structure. After fabricating the device, the measurement results demonstrate that the resonant frequency of the device is 7.24 kHz and the operating frequency is 56 Hz to 2360 Hz. At a frequency of 480 Hz, the sensitivity, minimum detectable acceleration, and resolution of the device are 2.448 mV/g, 1 mg, and 1 mg, respectively. The linearity of the accelerometer is good for accelerations less than 2 g. The proposed piezoelectric MEMS accelerometer has demonstrated high sensitivity and linearity, making it suitable for accurately detecting low-frequency vibrations.

Bowel sounds contain some important human physiological parameters which can reflect information about intestinal function. In this work, in order to realize real-time monitoring of bowel sounds, a portable and wearable bowel sound electronic monitor based on piezoelectric micromachined ultrasonic transducers (PMUTs) is proposed. This prototype consists of a sensing module to collect bowel sounds and a GUI (graphical user interface) based on LabVIEW to display real-time bowel sound signals. The sensing module is composed of four PMUTs connected in parallel and a signal conditioning circuit. The sensitivity, noise resolution, and non-linearity of the bowel sound monitor are measured in this work. The result indicates that the designed prototype has high sensitivity (−142.69 dB), high noise resolution (50 dB at 100 Hz), and small non-linearity. To demonstrate the characteristic of the designed electronic monitor, continuous bowel sound monitoring is performed using the electronic monitor and a stethoscope on a healthy human before and after a meal. Through comparing the experimental results and analyzing the signals in the time domain and frequency domain, this bowel sound monitor is demonstrated to record bowel sounds from the human intestine. This work displays the potential of the sensor for the daily monitoring of bowel sounds.

Partial discharge (PD) localization is important for monitoring and maintaining high-voltage equipment, which can help to prevent accidents. In this work, an acoustic localization sensor based on microelectromechanical system (MEMS) microphone array is proposed, which can detect and locate the partial discharge through a beam-forming algorithm. The MEMS microphone array consists of eight commercial MEMS microphones (SPV08A0LR5H-1, Knowles Electronics, IL, USA) with an aperture size of about 0.1 m × 0.1 m, allowing for a small hardware size and low cost. In order to optimize the acoustic performance of the array, a random array topology is designed. The simulation analysis indicates that the designed random topology is superior to several commonly used topologies. In terms of the localization algorithm, a deconvolution method called Fourier-based fast iterative shrinkage thresholding algorithm (FFT-FISTA) is applied. Simulation and experiment results demonstrate that FFT-FISTA used in the proposed acoustic localization sensor has significant advantages over the conventional beam-forming algorithm on spatial resolution and sidelobe suppression. Experimental results also show that the average localization error of the proposed scheme is about 0.04 m, which can meet the demands of practical application.

In this paper, an ultrasonic target detection system based on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is proposed, which consists of the PMUTs based ultrasonic sensor and the sensor system. Two pieces of 3 × 3 PMUTs arrays with the resonant frequency of 115 kHz are used as transmitter and receiver of the PMUTs-based ultrasonic sensor. Then, the sensor system can calculate the target’s position through the signal received by the above receiver. The static and dynamic performance of the proposed prototype system are characterized on black, white, and transparent targets. The experiment results demonstrated that the proposed system can detect targets of different colors, transparencies, and motion states. In the static experiments, the static location errors of the proposed system in the range of 200 mm to 320 mm are 0.51 mm, 0.50 mm and 0.53 mm, whereas the errors of a commercial laser sensor are 2.89 mm, 0.62 mm, and N\A. In the dynamic experiments, the experimental materials are the targets with thicknesses of 1 mm, 1.5 mm, 2 mm and 2.5 mm, respectively. The proposed system can detect the above targets with a maximum detection error of 4.00%. Meanwhile, the minimum resolution of the proposed system is about 0.5 mm. Finally, in the comprehensive experiments, the proposed system successfully guides a robotic manipulator to realize the detecting, grasping, and moving of a transparent target with 1 mm. This ultrasonic target detection system has demonstrated a cost-effective method to detect targets, especially transparent targets, which can be widely used in the detection and transfer of glass substrates in automated production lines.