Robots with submillimeter dimensions are of interest for applications that range from tools for minimally invasive surgical procedures in clinical medicine to vehicles for manipulating cells/tissues in biology research. The limited classes of structures and materials that can be used in such robots, however, create challenges in achieving desired performance parameters and modes of operation. Here, we introduce approaches in manufacturing and actuation that address these constraints to enable untethered, terrestrial robots with complex, three-dimensional (3D) geometries and heterogeneous material construction. The manufacturing procedure exploits controlled mechanical buckling to create 3D multimaterial structures in layouts that range from arrays of filaments and origami constructs to biomimetic configurations and others. A balance of forces associated with a one-way shape memory alloy and the elastic resilience of an encapsulating shell provides the basis for reversible deformations of these structures. Modes of locomotion and manipulation span from bending, twisting, and expansion upon global heating to linear/curvilinear crawling, walking, turning, and jumping upon laser-induced local thermal actuation. Photonic structures such as retroreflectors and colorimetric sensing materials support simple forms of wireless monitoring and localization. These collective advances in materials, manufacturing, actuation, and sensing add to a growing body of capabilities in this emerging field of technology.

Polymer micro-ring resonators fabricated by a direct laser writing technique are presented as sensors for ultrasound detection. The optical micro-ring resonator consists of a micro-ring waveguide that acts as a wavelength selective feedback mirror to an erbium-doped fiber-ring laser (FRL). The micro-ring resonator reflection spectrum determines the lasing frequencies of the FRL. Acoustic waves, which cause strain or deformation of the micro-ring resonator, lead to shifts of the resonance wavelength and thereby shifts in the FRL lasing spectrum. The spectral shifts are demodulated using an unbalanced Michelson interferometer. The experiments demonstrate that polymer micro-ring resonators integrated with a FRL can be used as adaptive high-frequency ultrasound detectors.

In this paper, a polymer micro-Fabry–Pérot interferometer (FPI) fabricated via direct laser writing using two-photon polymerization techniques on a single mode fiber tip is proposed, designed, simulated, and experimentally demonstrated as a magnetic field probe. The sensor comprises a tapered waveguide with a length of 100 µm and a diameter of 1 µm along the axis connecting the two reflecting surfaces of the micro-FPI open cavity. The cavity is filled with a magnetic fluid (MF) changing the evanescent coupling and consequently leading to a change in the phase of the FPI. To improve the signal reflection, a thin layer of Au is coated on the device before fabricating the probe sensor, which is then sealed in a MF-filled glass tube. The experimental results show that the proposed probe sensor has a low temperature sensitivity and a sensitivity to magnetic field as high as 1.54 nm/mT, and the magnetic field measurement accuracy is ∼649.4 $\mu$ T within a range from 1 mT to 8 mT. The microsensor, which is very stable and easy to fabricate, can be used as a probe to detect weak magnetic fields.

We demonstrate a three-dimensional (3D)-printed miniature optical fiber-based polymer Fabry–Perot (FP) interferometric pressure sensor based on direct femtosecond laser writing through two-photon polymerization. An unsealed cylinder column with a suspended polymer diaphragm is directly printed on a single-mode fiber tip to form an FP cavity. Here, two FP cavities with different lengths and the same diaphragm thickness (5 µm) are presented. The fabricated FP interferometer has a fringe contrast larger than 15 dB. The experimental results show that the fabricated device with a 140 µm cavity length has a linear response to the change of pressure with a sensitivity of 3.959 nm/MPa in a range of 0–1100 kPa, and the device with a 90 µm cavity length has a linear pressure sensitivity of 4.097 nm/MPa. The temperature sensitivity is measured to be about 160.2 pm/°C and 156.8 pm/°C, respectively, within the range from 20 to 70°C. The results demonstrate that 3D-printing techniques can be used for directly fabricating FP cavities on optical fiber tips for sensing applications.

Optical fiber microresonators have attracted considerable interest for acoustic detection because of their compact size and high optical quality. Here, we have proposed, designed, and fabricated a spring-based Fabry–Pérot cavity microresonator for highly sensitive acoustic detection. We observed two resonator vibration modes: one relating to the spring vibration state and the other determined by the point-clamped circular plate vibration mode. We found that the vibration modes can be coupled and optimized by changing the structure size. The proposed resonator is directly 3D printed on an optical fiber tip through two-photon polymerization and is used for acoustic detection and imaging. The experiments show that the device exhibits a high sensitivity and low noise equivalent acoustic signal level of 2.39 mPa/Hz^1/2 at 75 kHz that can detect weak acoustic waves, which can be used for underwater object imaging. The results demonstrate that the proposed work has great potential in acoustic detection and biomedical imaging applications.