This paper presents a preliminary result about ultra-deep etched microstructures on 〈1 0 0〉 silicon wafer based on metal assisted chemical etching (MaCE). Honeycomb hole arrays with 50 µ m width were successfully etched, as deep as 280 µ m. The porous defects on the patterned surface and the lateral etching on the sidewall were effectively suppressed by optimizing the etchant solution. The results in this paper indicate that 〈1 0 0〉 silicon can be etched vertically with smooth sidewalls by an etchant solution containing ethanol, instead of the conventional aqueous-based solution. This improved method of MaCE has potential application in large-scale Si etching as a supplementary method to the expensive and complicated dry etching method.

In this study, we developed a low-cost, reusable, and highly sensitive analytical platform for the detection of the human metabolite uric acid (UA). This novel analysis platform combines the graphene chemoresistor detection technique with a magnetic bead (MB) system. The heterojunction (single-layer graphene and HfO₂ thin-film material) of our graphene-based biosensor worked as a transducer to detect the pH change caused by the specific catalytic reaction between UA and uricase, and hence acquires a UA concentration. Immobilization of uricase on MBs can decouple the functionalization steps from the sensor surface, which allows the sensor to be reusable. Our microsensor platform exhibits a relatively lower detection limit (1 μM), high sensitivity (5.6 mV/decade), a linear range (from 1 μM to 1000 μM), and excellent linearity (R² = 0.9945). In addition, interference assay and repeatability tests were conducted, and the result suggests that our method is highly stable and not affected by common interfering substances (glucose and urea). The integration of this high-performance and compact biosensor device can create a point-of-care diagnosis system with reduced cost, test time, and reagent volume.

Piezoelectric micromechanical ultrasonic transducers (pMUTs) are new types of distance sensors with great potential for applications in automotive, unmanned aerial vehicle, robotics, and smart homes. However, previously reported pMUTs are limited by a short sensing distance due to lower output sound pressure. In this work, a pMUT with a special dual-ring structure based on scandium-doped aluminum nitride (ScAlN) is proposed. The combination of a dual-ring structure with pinned boundary conditions and a high piezoelectric performance ScAlN film allows the pMUT to achieve a large dynamic displacement of 2.87 μm/V and a high electromechanical coupling coefficient ($k_t^2$) of 8.92%. The results of ranging experiments show that a single pMUT achieves a distance sensing of 6 m at a resonant frequency of 91 kHz, the farthest distance sensing registered to date. This pMUT provides surprisingly fertile ground for various distance sensing applications.

Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing applications. However, the rapid movement of miniature robots in complex environments necessitates higher ranging capabilities from sensors, making the enhancement of PMUT sensing distance critically important. In this paper, a scandium-doped aluminum nitride (ScAlN) PMUT based on a flexurally suspended membrane is proposed. Unlike the traditional fully clamped design, the PMUT incorporates a partially clamped membrane, thereby extending the vibration displacement and enhancing the output sound pressure. Experimental results demonstrate that at a resonant frequency of 78 kHz, a single PMUT generates a sound pressure level (SPL) of 112.2 dB at a distance of 10 mm and achieves a high receiving sensitivity of 12.3 mV/Pa. Distance testing reveals that a single PMUT equipped with a horn can achieve a record-breaking distance sensing range of 11.2 m when used alongside a device capable of simultaneously transmitting and receiving ultrasound signals. This achievement is significant for miniaturized and integrated applications that utilize ultrasound for long-range target detection.

Piezoelectric micromachined ultrasonic transducers (PMUTs) have attracted widespread attention due to their high performance, miniaturization, and easy integration with semiconductor processes. In this paper, a PMUT device based on high-performance and lead-free Na_0.5Bi_0.5TiO₃-BaTiO₃ (NBBT) piezoelectric single-crystal thin films was designed for the application of medical high-frequency ultrasonics. Three-dimensional modeling and analysis of PMUT elements on the proposed structure were performed via the finite element method. The relationship between structure configuration in terms of the top electrode and the cavity shape of the bottom was studied. The PMUT properties and its device performance, including resonant frequency, effective electromechanical coupling factor ($k_{eff}^2$), and the static sensitivity of different device structures, were analyzed. In addition, by rotating the Euler Angle $\gamma$ of the NBBT piezoelectric single-crystal film, the static sensitivity and $k_{eff}^2$ of the model are improved to 1.34 when $\gamma$ is rotated to 45 ± 5°. It was shown that the PMUT using rotated NBBT demonstrated an enhanced relative pulse-echo sensitivity of −46 dB and a bandwidth of 35% when the reflective surface was 200 μm. We conclude that the PMUT in accordance with an NBBT piezoelectric single-crystal film designed by simulation offers a high frequency, larger$k_{eff}^2$, and high sensitivity, which provides application prospects in high-resolution and high-frequency medical ultrasonic imaging.

Due to their compact sizes, low power consumption levels, and convenient integration capabilities, piezoelectric micromachined ultrasonic transducers (PMUTs) have gained significant attention for enabling environmental sensing functionalities. However, the frequency inconsistency of the PMUT arrays often leads to directional errors with the ultrasonic beams. Herein, we propose a reconfigurable PMUT array based on a Sc_0.2Al_0.8N piezoelectric thin film for in-air ranging. Each element of the reconfigurable PMUT array possesses the ability to be independently replaced, enabling matching of the required frequency characteristics, which enhances the reusability of the device. The experimental results show that the frequency uniformity of the 2 × 2 PMUT array reaches 0.38% and the half-power beam width (θ_−3dB) of the array measured at 20 cm is 60°. At a resonance of 69.7 kHz, the sound pressure output reaches 7.4 Pa (sound pressure level of 108.2 dB) at 19 mm, with a reception sensitivity of approximately 11.6 mV/Pa. Ultimately, the maximum sensing distance of the array is 7.9 m, and it extends to 14.1 m with a horn, with a signal-to-noise ratio (SNR) of 19.5 dB. This research significantly expands the ranging capability of PMUTs and showcases their great potential in environmental perception applications.