To explore the versatility of speakers, a piezoelectric micro-electro-mechanical system (MEMS) speaker combining the function of a silent alarm is proposed, which mainly comprises a lead zirconate titanate (PZT) actuation layer and a rigid–flexible coupling supporting layer. Measurements performed on encapsulated prototypes mounted to an artificial ear simulator have revealed that, compared to a speaker with a rigid supporting layer, the sound pressure level (SPL) of the proposed piezoelectric MEMS speaker with a rigid–flexible coupling supporting layer is significantly higher and is especially higher by 4.1–20.1 dB in the frequency range from 20 Hz to 4.2 kHz, indicating that the rigid–flexible coupling supporting layer can improve the SPL significantly in low frequency. Moreover, the spectral distribution characteristic of its playback audio is similar to that of the commercial electromagnetic type. The device can also function as a silent alarm based on oral airflows in dangerous situations, as it performs well at recognizing words according to their unique voltage-signal characteristics, and can avoid the effects of external sound noise, body movement, long distance, and occlusion. This strategy provides inspiration for functional diversification of piezoelectric MEMS speakers.

Conventionally designed piezoelectric micro-electro-mechanical systems (MEMS) speakers with thin-film-type, piston-type, and cantilever-type vibration membranes still adopt a Si supporting layer, which not only hinders the improvement of sound pressure level (SPL) but also lacks characterization of reliability. In this paper, we propose a fixed-end beam–cantilever piezoelectric MEMS speaker with a flexible supporting layer, achieving an SPL comparable to that of traditional three types of piezoelectric MEMS speakers with a Si supporting layer, and displaying good reliability. The measured results performed on encapsulated prototypes mounted to an acoustic test adaptor demonstrate that under a driving voltage of 1 V_rms, the SPL exceeds 51.6 dB in the human audible frequency range of 20 Hz–20 kHz, the total harmonic distortion (THD) remains below 3.4% above 430 Hz, satisfying the basic requirements for human auditory perception. Moreover, further experiments also prove its reliability by revealing no abnormal sound output, no fracture after being dropped from heights of 1 to 5 m, and the retention of over 92% SPL following 100 h of continuous music playback. This fixed-end beam–cantilever piezoelectric MEMS speakers with a flexible supporting layer provide researchers and enterprises with brand-new design ideas and a fresh perspective, which may potentially promote their development and practical application.