Prof. Taesung Kim received his B.S. from Seoul National University in 1994 and his PhD. degree in 2002 from the University of Minnesota. He is currently a professor in the Department of Mechanical Engineering and SAINT at Sungkyunkwan University. His research interests are aerosol technology, semiconductor processes (chemical mechanical planarization and cleaning), and plasma processes for 2D material synthesis.
Research Keywords & Expertise
Cleaning
CMP
Contamination Control
optical fiber sensors
Graphene/2-D material ...
Short Biography
Prof. Taesung Kim received his B.S. from Seoul National University in 1994 and his PhD. degree in 2002 from the University of Minnesota. He is currently a professor in the Department of Mechanical Engineering and SAINT at Sungkyunkwan University. His research interests are aerosol technology, semiconductor processes (chemical mechanical planarization and cleaning), and plasma processes for 2D material synthesis.