Takao Okabe

Dr. Takao Okabe


Research Focus & Metrics

Academic Career Length

10Years (2017-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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1 March 2020 in Microelectronic Engineering
Verified
Journal Article
Closed access
RARyota Akama
Ryota Akama
TOTakao Okabe
Takao Okabe
KSKazuyoshi Sato
Kazuyoshi Sato
YIYoshiki Inaba
Yoshiki Inaba
NSNaoki Shikazono
Naoki Shikazono
JTJun Taniguchi
Jun Taniguchi

1 May 2019 in Microelectronic Engineering
Verified
Journal Article
Closed access
TOTakao Okabe
Takao Okabe
HMHiroo Maebashi
Hiroo Maebashi
JTJun Taniguchi
Jun Taniguchi

1 April 2020 in Microelectronic Engineering
Verified
Journal Article
Closed access
HMHaruki Matsumoto
Haruki Matsumoto
TOTakao Okabe
Takao Okabe
JTJun Taniguchi
Jun Taniguchi


28 November 2023 in Nanomaterials
Verified
Journal Article
Open access
PDF file
TOTakao Okabe
Takao Okabe
JTJinchen Tang
Jinchen Tang
KNKatsuhiko Nishimura
Katsuhiko Nishimura
NSNAOKI SHIKAZONO
NAOKI SHIKAZONO
This study introduces an innovative photolithography-based method for patterning ionic and inorganic particle materials such as silver iodide (AgI). Conventional methods lack precision when patterning powdered materials, which limits their applicability. The proposed method stacks layers of a particle material (AgI) and negative-tone photoresist for simultaneous ultraviolet exposure and development, resulting in well-defined AgI patterns. The sintering process successfully removed binders from the material layer and photoresist, yielding standalone AgI patterns on the Si substrate with good adhesion. The pitch remained consistent with the design values of the photomask when the pattern size was changed. In-situ observation of condensation frosting on the patterns was conducted, which confirmed the practicality of the developed patterning process. This versatile method is applicable to large areas with a high throughput and presents new opportunities for modifying functional surfaces.

1 January 2017 in Precision Engineering
Verified
Journal Article
Closed access
TOTakao Okabe
Takao Okabe
DMDaichi Moritaka
Daichi Moritaka
MMMasaaki Miyatake
Masaaki Miyatake
YKYukishige Kondo
Yukishige Kondo
SSShinya Sasaki
Shinya Sasaki
SYShigeka Yoshimoto
Shigeka Yoshimoto